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Carbon Film Synthesis on the Water by Excimer Laser Irradiation

Published online by Cambridge University Press:  10 February 2011

H. Hidai  and
H. Tokura
H. Hidai
Affiliation:
Department of Control and Systems Engineering, Tokyo Institute of Technology, 2-12-1 0- okayama, Meguro, Tokyo, JAPAN 152-8552, [email protected], [email protected]
H. Tokura
Affiliation:
Department of Control and Systems Engineering, Tokyo Institute of Technology, 2-12-1 0- okayama, Meguro, Tokyo, JAPAN 152-8552, [email protected], [email protected]
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Abstract

Water was used as a substrate and carbon films were obtained from methane gas on the water by ArF excimer laser. The film was analyzed by a SEM, elementary analysis, Raman spectrum and FT-IR. Moreover synthesized position of the film was studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 555: Symposium OO – Properties and Processing of Vapor-Deposited Coatings , 1998 , 261
Copyright
Copyright © Materials Research Society 1999

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