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Calculation of Intrinsic Stresses and Elastic Moduli in Nonhomogeneous Thin Films

Published online by Cambridge University Press:  21 March 2011

Pedro C. Andia ,
Francesco Costanzo ,
Gary L. Gray  and
Thomas J. Yurick
Pedro C. Andia
Affiliation:
Laboratory for Parallel and Computational Mechanics Engineering Science and Mechanics Department, The Pennsylvania State UniversityUniversity Park, PA 16802, USA
Francesco Costanzo
Affiliation:
Laboratory for Parallel and Computational Mechanics Engineering Science and Mechanics Department, The Pennsylvania State UniversityUniversity Park, PA 16802, USA
Gary L. Gray
Affiliation:
Laboratory for Parallel and Computational Mechanics Engineering Science and Mechanics Department, The Pennsylvania State UniversityUniversity Park, PA 16802, USA
Thomas J. Yurick
Affiliation:
Laboratory for Parallel and Computational Mechanics Engineering Science and Mechanics Department, The Pennsylvania State UniversityUniversity Park, PA 16802, USA
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Abstract

An approach is presented for the determination of the residual stresses and elastic moduli of particle systems resulting from computer simulations of particle or atomic deposition. The proposed technique is based on fundamental concepts of elasticity and is capable of capturing the variation of stresses and moduli as functions of position within the system. Application to a simple particle system consisting of a deposited thin film is demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 653: Symposium Z – Multiscale Modeling of Materials-2000 , 2000 , Z10.3.1
Copyright
Copyright © Materials Research Society 2001

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References

[1] Nix, W. D., Metallurgical Transaction A 20, 2217 (1989).Google Scholar
[2] Nicholson, E. D. and Field, J. E., Journal of Hard Materials 5, 89 (1994).Google Scholar
[3] Freund, L. B., Journal of the Mechanics and Physics of Solids 44, 723 (1996).Google Scholar
[4] Fahnline, D. E., Masters, C. B., and Salamon, N. J., Journal of Vacuum Science and Technology A 9, 2483 (1991).Google Scholar
[5] Gurtin, M. E., An Introduction to Continuum Mechanics, Vol. 158 of Mathematics in Science and Engineering (Academic Press, Inc., San Diego, California, 1981).Google Scholar
[6] Martin, J. W., Journal of Physics C: Solid State Physics 8, 2837 (1975).Google Scholar
[7] Alber, I. et al. , Philosophical Transactions of the Royal Society of London A 339, 555 (1992).Google Scholar
[8] Andia, P. C., Costanzo, F., and Gray, G. L., in Complex Mediums, edited by Lakhtakia, A., Weiglhofer, W. S., and Messier, R. F. (Proceedings of SPIE's 45th Annual Meeting, San Diego, CA, 2000), Vol. 4097, pp. 280–290.Google Scholar
[9] Haile, J. M., Molecular Dynamics Simulation: Elementary Methods (John Wiley & Sons, New York, 1992).Google Scholar