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Bond Graphs For Cvd Processes

Published online by Cambridge University Press:  21 February 2011

Surya R. Kalidindi  and
Seshu B. Desu
Surya R. Kalidindi
Affiliation:
Department of Mechanical Engineering, MIT, Cambridge, MA 02139.
Seshu B. Desu
Affiliation:
Department of Materials Engineering, VPI & SU, Blacksburg, VA 24061.
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Abstract

A unified approach to model the general CVD process, utilizing the versatility and flexibility of bond graph methods, is presented. The bond graph representations for important CVD sub-processes are derived. The application of these elements is illustrated through hypothetical examples of CVD processes. It is also shown that several different CVD processes can be handled by a single bond graph computer program.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 168 , 1989 , 37
Copyright
Copyright © Materials Research Society 1990

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References

[1]Rosenberg, R. C. and Karnopp, D. C., Introduction to Physical System Dynamics, McGraw-Hill (1983).Google Scholar
[2]Thoma, J. U., Introduction to Bond Graphs and Their Applications, Pergamon press (1975).Google Scholar
[3]Wellstead, P. E., Introduction to Physical System Modelling, Academic Press (1979).Google Scholar
[4]Kalidindi, S. R. and Desu, S. B., J. Appl. Phys., to be published.Google Scholar