No CrossRef data available.
Article contents
Bond Graphs For Cvd Processes
Published online by Cambridge University Press: 21 February 2011
Abstract
A unified approach to model the general CVD process, utilizing the versatility and flexibility of bond graph methods, is presented. The bond graph representations for important CVD sub-processes are derived. The application of these elements is illustrated through hypothetical examples of CVD processes. It is also shown that several different CVD processes can be handled by a single bond graph computer program.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1990