Hostname: page-component-cd9895bd7-p9bg8 Total loading time: 0 Render date: 2024-12-27T02:39:04.416Z Has data issue: false hasContentIssue false
  • English
  • Français

Binary Optics Microlens Arrays in CdTe.

Published online by Cambridge University Press:  25 February 2011

M.B. Stem ,
W.F. Delaney ,
M. Holz ,
K.P. Kunz ,
K.R. Maschhoff  and
J. Welsch
M.B. Stem
Affiliation:
MIT Lincoln Laboratory, Lexington, MA 02173
W.F. Delaney
Affiliation:
MIT Lincoln Laboratory, Lexington, MA 02173
M. Holz
Affiliation:
MIT Lincoln Laboratory, Lexington, MA 02173
K.P. Kunz
Affiliation:
Loral Infrared and Imaging Systems, Lexington, MA 02173
K.R. Maschhoff
Affiliation:
Loral Infrared and Imaging Systems, Lexington, MA 02173
J. Welsch
Affiliation:
Loral Infrared and Imaging Systems, Lexington, MA 02173
Get access

Abstract

Arrays of miniature focusing optics located at the focal plane can improve the performance of focal plane systems. By more completely collecting the light at the focal plane and concentrating it into a smaller spot size on the detector plane, the photodetector area can be substantially reduced. Increased gamma radiation hardening and noise reduction result from the decrease in photodetector surface area. Binary optics technology, a process for fabricating large arrays of diffractive optical elements, is especially attractive for infrared materials. In this paper, diffractive Fresnel microlens arrays containing over six thousand F/0.9 lenslets are patterned in the surface of CdTe substrates by successive photolithographic and Ar+ ion-beam-etching steps. Results on smaller arrays of monolithically integrated binary-optics lenslets with II-VI detectors, demonstrating enhanced photodetector responsivities, are presented for the first time.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 216: Symposium T – Long-Wavelength Semiconductor Devices, Materials and Processes , 1990 , 107
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Leger, J.R., Holz, M., Swanson, G.J. and Veldkamp, W., Lincoln Lab. J. 1, 225–246 (1988).Google Scholar
2. Leger, J.R., Scott, M.L., Bundman, P., and Griswold, M.P., SPIE Proc. 884, 82–89 (1988).Google Scholar
3. Swanson, G., Knowlden, R., and Veldkamp, W., unpublished.Google Scholar
4. Goltos, W. and Holz, M., SPIE Proc. 1052, 131–141, 1989.Google Scholar
5. Veldkamp, W.B. and Swanson, G.J., SPIE Proc. 437,54–59 (1983).Google Scholar
6. Swanson, G.J., Tech. Rep. 854, MIT Lincoln Laboratory, Aug. 1989.Google Scholar
7. Damman, H., Optik 31, 95–104 (1970); Optik 53, 409-417 (1979).Google Scholar
8. d'Auria, L., Huignard, J.P., Roy, A.M., and Spitz, E., Opt. Comm. 5, 232–235 (1972).Google Scholar
9. Swanson, G. and Knowlden, R., presented at the 1990 OSA Fall Meeting, Boston, MA, 1990 (unpublished).Google Scholar
10. Micro Mask, Inc., Sunnyvale, Cal.Google Scholar
11. Brice, J.C., Properties of Mercury Cadmium Telluride, edited by Brice, John and Capper, Peter, (INSPEC, The Institution of Electrical Engineers, Publisher, New York, 1987).Google Scholar
12. Cox, J.A., Werner, T., Lee, J., Nelson, S., Fritz, B., and Bergstrom, J., SPIE Proc. 1211, 116–124 (1990).Google Scholar
13. Farn, M.W. and Goodman, J.W., SPIE Proc. 1211, 125–136 (1990).Google Scholar
14. Telic Optics, Inc., Marlborough, MA.Google Scholar
15. Krueger, E.E., Pultz, G.N., Norton, P.W., Mroczkowski, J.A., Weiler, M.H., and Reine, M.B., Proc. MRS Symp. 216, (1991).Google Scholar
16. Pultz, G.N., Norton, P.W., Krueger, E.E., and Reine, M.B., J. Vac. Sci. Tech. (to be published (1991).Google Scholar