Hostname: page-component-cd9895bd7-7cvxr Total loading time: 0 Render date: 2024-12-27T01:41:32.039Z Has data issue: false hasContentIssue false
  • English
  • Français

Bi-Directional Motion Achieved with a Surface Micromachined Electrothermal MEMS Microengine

Published online by Cambridge University Press:  01 February 2011

Edward Kolesar ,
Alfred Jayachandran ,
William Odom ,
Matthew Ruff ,
Justin McAllister ,
Simon Ko ,
Jeffrey Howard ,
Peter Allen ,
Richard Wilks  and
Josh Wilken
...Show all authors
Edward Kolesar
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Alfred Jayachandran
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
William Odom
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Matthew Ruff
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Justin McAllister
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Simon Ko
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Jeffrey Howard
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Peter Allen
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Richard Wilks
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Josh Wilken
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Noah Boydston
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Jorge Bosch
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Get access

Abstract

This research is focused on the design and experimental characterization of an electrothermal microengine that is capable of bi-directional motion. The microengine has been operated to control the position a linear shuttle and rotate a set of gears.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 785: Symposium D – Materials and Devices for Smart Systems , 2003 , D11.7
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Ristic, L. (ed.), Sensor Technology and Devices, (Artech House, Norwood, MA, 1994).Google Scholar
2. Pan, C. and Hsu, W., “An electro-thermally and laterally driven polysilicon microactuator,” J. Micromech. Microeng., 7, 7 (1997).10.1088/0960-1317/7/1/003Google Scholar
3. Kolesar, E., Ruff, M., Odom, W., Jayachandran, J., McAllister, J., Ko, S., Howard, J., Allen, P., Wilken, J., Boydston, N., Bosch, J. and Wilks, R., in Materials Science of Microelectromechanical Systems (MEMS) Devices V, edited by LaVan, D., Ayon, A., Buchheit, T. and Madou, M. (Mater. Res. Soc. Proc. 741, Warrendale, PA, 2003) pp. 93–98.Google Scholar
4. MEMSPro® CAD Software Manual, version 4, MEMSCAP Corp., 2055 Gateway Place, Suite #400, San Jose, CA 95110 (Internet WEB address: www.memsrus.com).Google Scholar
5. Koester, D., Mahedevan, R., Shishkoff, A., and Markus, K., Polysilicon Multi-User MEMS Processes (PolyMUMPS) Introduction and Design Rules, revision 4, MEMSCAP Technology Applications Center, 3021 Cornwallis Road, Research Triangle Park, NC 27709.Google Scholar