Hostname: page-component-848d4c4894-xm8r8 Total loading time: 0 Render date: 2024-07-05T21:13:25.420Z Has data issue: false hasContentIssue false
  • English
  • Français

Beryllium-Based Multilayer Structures

Published online by Cambridge University Press:  15 February 2011

D. G. Stearns ,
K. M. Skulina ,
M. Wall ,
C. S. Alford ,
R. M. Bionta ,
D. M. Makowiecki ,
E. M. Gullikson ,
R. Soufli ,
J. B. Kortright  and
J. H. Underwood
D. G. Stearns
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
K. M. Skulina
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
M. Wall
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
C. S. Alford
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
R. M. Bionta
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
D. M. Makowiecki
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
E. M. Gullikson
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
R. Soufli
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
J. B. Kortright
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
J. H. Underwood
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
Get access

Abstract

Multilayer (ML) structures composed of Mo-Be, Ru-Be and Rh-Be with bilayer periods of - 6 nm have been grown using dc magnetron sputter deposition. The ML microstructure has been characterized using x-ray diffraction and high-resolution transmission electron microscopy, and the normal incidence reflectivity has been measured at soft x-ray wavelengths.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 382: Symposium G – Structure and Properties of Multilayered Thin Films , 1995 , 329
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1) Bjorkholm, J. E., Bokor, J., Eichner, L., Freeman, R. R., Gregus, J., Jewell, T. E., Mansfield, W. M., MacDowell, A. A., Raab, E. L., Silfvast, W. T., Szeto, L. H., Tennant, D. M., Waskewicz, W. K., White, D. L., Windt, D. L., Wood, O.R. II and Bruning, J. H., J. Vac. Sci. Technol. B 8, 1509 (1990).Google Scholar
2) Trail, J. A. and Byer, R. L., Opt. Lett. 14, 539 (1989).Google Scholar
3) Walker, A. B. C. Jr., Barbee, T. W. Jr., Hoover, R. B. and Lindblom, J. F., Science 241, 1781 (1988).Google Scholar
4) Stearns, D. G., Rosen, R. S. and Vernon, S. P., Appl. Opt. 32, 6952 (1993).Google Scholar
5) Skulina, K. M., Alford, C. S., Bionta, R. M., Makowiecki, D. M., Gullikson, E. M., Soufli, R., Kortright, F. B. and Underwood, J. H., Appl. Opt. 34, accepted for publication.Google Scholar
6) Cheng, Y., Smith, D. J., Stearns, M. B. and Stearns, D. G., J. Appl. Phys. 72, 5165 (1992).Google Scholar
7) Gullikson, E. M., Underwood, J. H., Batson, P.C. and Nikitin, V., X-ray, J. Sci. and Tech. 3, 283 (1992).Google Scholar
8) Henke, B. L., Gullikson, E. M. and Davis, J. C., Atom. Data and Nucl. Data Tables 54, 181 (1993).Google Scholar