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Beryllium-Based Multilayer Structures

Published online by Cambridge University Press:  15 February 2011

D. G. Stearns ,
K. M. Skulina ,
M. Wall ,
C. S. Alford ,
R. M. Bionta ,
D. M. Makowiecki ,
E. M. Gullikson ,
R. Soufli ,
J. B. Kortright  and
J. H. Underwood
D. G. Stearns
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
K. M. Skulina
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
M. Wall
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
C. S. Alford
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
R. M. Bionta
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
D. M. Makowiecki
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
E. M. Gullikson
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
R. Soufli
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
J. B. Kortright
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
J. H. Underwood
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
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Abstract

Multilayer (ML) structures composed of Mo-Be, Ru-Be and Rh-Be with bilayer periods of - 6 nm have been grown using dc magnetron sputter deposition. The ML microstructure has been characterized using x-ray diffraction and high-resolution transmission electron microscopy, and the normal incidence reflectivity has been measured at soft x-ray wavelengths.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 382: Symposium G – Structure and Properties of Multilayered Thin Films , 1995 , 329
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

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