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Benefits and limits of the thermodynamic approach to C.V.D. Processes

Published online by Cambridge University Press:  21 February 2011

C. Bernard  and
R. Madar
C. Bernard
Affiliation:
Laboratoire de Thermodynamique et Physico-Chimie Méalurgiques, ENSEEG, BP 75 - 38042 Saint-Martin-d'Hères Cedex, France.
R. Madar
Affiliation:
Laboratoire des Matériaux et du Génie Physique, ENSPG, BP 46, 38402 Saint-Martin-d'Hères, France.
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Abstract

This paper intends to develop and illustrate by a few examples the principles of thermodynamic analysis which can be applied at an early stage to assist in selecting the following:

• the material to be deposited for a well-defined application,

• the nature of reactants

• the range of experimental parameters.

Specific emphasis will be given to the main problems relating to data selection: assessments, availability of coherent data, sensitivity of results to data accuracy, etc.

Finally, the validity of a thermodynamic approach at equilibrium will be discussed with a view to optimizing a dynamic non-equilibrium process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 168 , 1989 , 3
Copyright
Copyright © Materials Research Society 1990

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