Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-11-23T19:16:54.343Z Has data issue: false hasContentIssue false

Atomic Layer Deposition of Gallium-Doped Zinc Oxide Transparent Conducting Oxide films

Published online by Cambridge University Press:  04 April 2011

Paul R. Chalker
Affiliation:
Materials Science and Engineering, University of Liverpool, Liverpool, UK L69 3BX
Paul A. Marshall
Affiliation:
Materials Science and Engineering, University of Liverpool, Liverpool, UK L69 3BX
Simon Romani
Affiliation:
Materials Science and Engineering, University of Liverpool, Liverpool, UK L69 3BX
Matthew J. Rosseinsky
Affiliation:
Department of Chemistry, University of Liverpool, Liverpool, UK L69 7ZD
Simon Rushworth
Affiliation:
SAFC Hitech, Power Road, Bromborough, Wirral, Merseyside, UK CH62 3QF
Paul A. Williams
Affiliation:
SAFC Hitech, Power Road, Bromborough, Wirral, Merseyside, UK CH62 3QF
John Buckett
Affiliation:
Pilkington Technology Management Limited, Hall Lane, Lathom, Ormskirk, Lancashire, UK, L40 5UF
Neil McSporran
Affiliation:
Pilkington Technology Management Limited, Hall Lane, Lathom, Ormskirk, Lancashire, UK, L40 5UF
John Ridealgh
Affiliation:
Pilkington Technology Management Limited, Hall Lane, Lathom, Ormskirk, Lancashire, UK, L40 5UF
Get access

Abstract

Thin transparent conducting oxide (TCO) films of gallium-doped zinc oxide have been deposited on glass substrates by atomic layer deposition (ALD) using diethyl zinc, triethyl gallium and water vapour as precursors. The gallium-doped zinc oxide films were deposited over the temperature range 100-350°C. Transmission electron microscopy reveals that the as-deposited films are polycrystalline in character. The electrical resistivity of the gallium-doped zinc oxide films was evaluated using four-point probe and contactless measurement methods as a function of film thickness. The lowest sheet resistance of 16 Ω/☐ was measured from a film thickness of 400nm and a gallium content of 5 atomic percent. The electron Hall mobility of this film was 12.3 cm2/Vs. The visible transmittance of the films was 78% with a haze of 0.2%.

Type
Research Article
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Edwards, P. P., Porch, A., Jones, M. O., Morgan, D. V. and Perks, R. M., Dalton Trans. 2004, 2995 Google Scholar
[2] Jones, A.C. and Chalker, P.R., J. Phys. D. Appl. Phys., 2003, 36, R80.Google Scholar
[3] Suntola, T., Mater. Sci. Rep. 4 (1989) 261 Google Scholar
[4] Ritala, M., Leskela, M., Dekker, J.-P., Mutsaers, C., Soininen, P.J., Skarp, J., Chem. Vap. Depos. 5 (1999) 7 Google Scholar
[5] Na, Jeong-Seok, Scarel, Giovanna, and Parsons, Gregory N., J. Phys. Chem. C 2010, 114, 383 Google Scholar
[6] An, K.S., Cho, W., Lee, B.K., Lee, S.S., Kim, C.G., J. Nanoscience and Nanotechnology 8(9) 2008 4856 Google Scholar
[7] Minami, T., MRS Bull. 25 (2000) 38.Google Scholar
[8] Yamada, T., Miyake, A., Kishimoto, S., Makino, H., Yamamoto, N., Yamamoto, T., Appl. Phys. Lett. 91 2007 051915 Google Scholar
[9] Theiss, W., CODE 3.16, Hard- and Software, Dr.-Bernhard-Klein-Str. 110, D-52078 Aachen, Germany Google Scholar