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Atomic Arrangements in Short period MO-GE Multilayers Determined by X-Ray Anomalous Scattering and EXAFS

Published online by Cambridge University Press:  25 February 2011

Lane Wilson  and
Arthur Bienenstock
Lane Wilson
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
Arthur Bienenstock
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
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Abstract

Studies of atomic arrangements in amorphous and crystalline, short period Mo-Ge multilayers using synchrotron radiation X-ray diffraction (transmission and reflection), supplemented by EXAFS, are described. Differential anomalous scattering and EXAFS were utilized to determine the environment of each species. Intermixing, as well as a BCC epitaxial Ge structure, are among the observed structural characteristics. A wide range of structural variations is present indicating that specification of the layer thicknesses or composition profile alone is insufficient for characterization of the multilayers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 103 , 1987 , 69
Copyright
Copyright © Materials Research Society 1988

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References

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