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Published online by Cambridge University Press: 01 February 2011
This paper presents the use of a-Si:H electrolyte-gate thin film transistors (EG-TFTs) for the pH sensing and the detection of DNA and proteins (horseradish peroxidase, HRP). The sensing layer used was SiNx or SiO2. The devices show linear sensitivity to pH above the point of zero charge and respond to the adsorption of oligonuleotides and HRP with typical Langmuir adsorption behavior. DNA immobilization and hybridization detection is demonstrated. Surface control and reproducibility issues are addressed by the measurement of surface contact angles.