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Applications of PZT and Related Thin Films in Piezoelectric Microsensors

Published online by Cambridge University Press:  25 February 2011

D. L. Polla ,
C. Ye ,
P. Schiller ,
T. Tamagawa ,
W. P. Robbins ,
D. Glumac  and
C.-C. Hsueh
D. L. Polla
Affiliation:
University of Minnesota, Department of Electrical Engineering, Minneapolis, Minnesota 55455 USA
C. Ye
Affiliation:
University of Minnesota, Department of Electrical Engineering, Minneapolis, Minnesota 55455 USA
P. Schiller
Affiliation:
University of Minnesota, Department of Electrical Engineering, Minneapolis, Minnesota 55455 USA
T. Tamagawa
Affiliation:
University of Minnesota, Department of Electrical Engineering, Minneapolis, Minnesota 55455 USA
W. P. Robbins
Affiliation:
University of Minnesota, Department of Electrical Engineering, Minneapolis, Minnesota 55455 USA
D. Glumac
Affiliation:
University of Minnesota, Department of Electrical Engineering, Minneapolis, Minnesota 55455 USA
C.-C. Hsueh
Affiliation:
Currently with National Semiconductor, Santa Clara, CA
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Abstract

Ferroelectric thin films have been deposited on polycrystalline silicon micromechanical structures to form both physical microsensors and microactuator devices. These devices which include acoustic pressure sensors, infrared detectors, micropositioners, and stepper motors are based on either the piezoelectric or pyroelectric properties of sol-gel Pb(ZrxTi1-x)O3 or PbTiO3 deposited on surface-machined microelectromechanical structures. Several materials, micromachining, process integration, and performance issues are introduced in the description of these devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 55
Copyright
Copyright © Materials Research Society 1992

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