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Application of polyimide sacrificial layers for the manufacturing of uncooled double-cantilever microbolometers

Published online by Cambridge University Press:  01 February 2011

Shusen Huang  and
Xin Zhang
Shusen Huang
Affiliation:
[email protected], Boston University, Department of Manufacturing Engineering, United States
Xin Zhang
Affiliation:
[email protected], Boston University, Department of Manufacturing Engineering, United States
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Abstract

In this paper, a low-temperature surface micromachining module with two sacrificial layers of polyimide is developed for the manufacturing of double-cantilever microbolometer focal plane arrays. The use of spin-on polyimide allows an all-dry final release step overcoming stiction problems often encountered in wet sacrificial etching processes. For the patterning of the polyimide, a plasma-enhanced chemical vapor deposited silicon oxide is employed as a mask layer. Anisotropic etching of both the mask film and the polyimide layer is accomplished by reactive ion etching. After patterning structural layers, sacrificial etching of the polyimide is conducted using an isotropic dry etch process in high-density oxygen plasma.

Keywords

polymermicroelectro-mechanical (MEMS)microstructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 890: Symposium Y – Surface Engineering for Manufacturing Applications , 2005 , 0890-Y08-15
Copyright
Copyright © Materials Research Society 2006

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References

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