Published online by Cambridge University Press: 25 February 2011
Antiphase domain (APD) structures have been discovered in CdTe layers grown on (0001) sapphire substrates by MOCVD. To explain APD formation, an obstruction model based on a surface-reaction mechanism has been proposed. The proportion of one-phase domains to the total area varies with the [DETe]/[DMCd] ratio (VI/II ratio). A single-domain CdTe layer can be obtained at a VI/II ratio of 5. The APD structure shows a strong correlation with the crystallinity measured by X-ray. For a single-domain CdTe epilayer, theFWHM of the X-ray rocking curve shows 114 arc seconds and the EPD is 6×10 cm−2