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Analysis of Microfabricated Textured Multicrystalline Beams: II. Probabilistic Approach

Published online by Cambridge University Press:  15 February 2011

Dariush Mirfendereski ,
Armen Der Kiureghian  and
Mauro Ferrari
Dariush Mirfendereski
Affiliation:
Department of Civil Engineering, University of California, Berkeley CA 94720.
Armen Der Kiureghian
Affiliation:
Department of Civil Engineering, University of California, Berkeley CA 94720.
Mauro Ferrari
Affiliation:
Department of Civil Engineering, University of California, Berkeley CA 94720. also, Department of Materials Science and Mineral Engineering.
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Abstract

This paper reports on detailed approaches to the probabilistic modelling and analysis of multicrystalline microfabricated beams in the context of micro-electromechanical systems (mems) using simulation techniques. Random, textured multicrystalline beam structures are simulated and analyzed using the finite element method, employing randomly oriented orthotropic material properties to model each individual crystal grain.

The simulation studies are used to assess the influence of size effects and texture on overall beam characteristics, such as stiffness. Results of these studies are then compared with the current approaches based on deterministic analysis and employing simplifying assumptions such as homogeneous, isotropic material properties, and with results obtained from the homogenization approach of Part I.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 97
Copyright
Copyright © Materials Research Society 1992

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References

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