Hostname: page-component-78c5997874-8bhkd Total loading time: 0 Render date: 2024-11-05T21:11:05.076Z Has data issue: false hasContentIssue false

Analysis of High Resolution Electron Microscope Images of the Pd2Si-Si Interface

Published online by Cambridge University Press:  15 February 2011

W. Krakow*
Affiliation:
IBM T. J. Watson Research Center, P.O.Box 218, Yorktown Heights, NY 10598 (U.S.A.)
Get access

Extract

High resolution electron micrographs have been obtained from Pd2 Si-Si(111) interfaces viewed edge on and a detailed analysis of the interface structure has been carried out using computer simulations of the images. Since the stacking sequence of hexagonal Pd2Si is AαAαAα..., the question whether the interface plane of Pd2 Si is silicon rich, A, or silicon deficient, α, has been investigated. An advancing interface cannot be planar at all stages of growth; therefore the question of interface roughness along the direction of the electron beam and twinning orientations has been considered. This has been modeled by Fourier shift techniques incorporated into multislice dynamical theory and, of course, is complicated by the dynamical diffraction conditions of the structure and the contributions of high order Bragg reflections to image detail. It has been possible to access the image features present in Pd2 Si/Si micrographs and to point out the difficulties which are encountered not only in this system but in a wide variety of interface structures by high resolution electron microscopy. Perhaps the most important finding of this study is that the interface region contains a mixture of silicon-rich and silicon-deficient Pd2Si planes adjacent to the silicon side of the interface.

Type
Research Article
Copyright
Copyright © Materials Research Society 1982

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Chu, W.-K., Mayer, J. W. and Nicolet, M.-A., Backscattering Spectrometry, Academic Press, New York, 1978.Google Scholar
2 Ho, P.S., Schmid, P. E. and Föll, H., Phys. Rev. Lett., 46 (1981) 782.Google Scholar
3 Buckley, W. D. and Moss, S. C., Solid-State Electron., 15 (1972) 1331.Google Scholar
4 Köster, U., Tu, K. N. and Ho, P. S., Appl. Phys. Lett., 31 (1977) 634.CrossRefGoogle Scholar
5 Tu, K. N., Ohdomari, I. and Libertini, S. H., Proc. 9thInt. Congr. on Electron Microscopy, Toronto, 1978, Vol. 1, Imperial Press, Mississauga, Ontario, 1978, p. 138.CrossRefGoogle Scholar
6 Kuan, T. S. and Tu, K. N., Proc. 9thInt. Congr. on Electron Microscopy, Toronto, 1978, Vol. 1, Imperial Press, Mississauga, Ontario, 1978, p. 304.Google Scholar
7 Sheng, T. T. and Chang, C. C., IEEE Trans. Electron Devices, 23 (1976) 531.Google Scholar
8 Ponce, F. A., in Narayan and Tan (eds.), Defects in Semiconductors, North-Holland, Amsterdam, 1981, p. 285.Google Scholar
9 Föll, H., Ho, P. S. and Tu, K. N., J. Appl. Phys., 52(1981)250.Google Scholar
10 Cherns, D. and Smith, D. A., in Narayan and Tan (eds.), Defects in Semiconductors, North-Holland, Amsterdam, 1981, p. 291.Google Scholar
11 Cherns, D., Krakow, W. and Smith, D. A., Proc. 2ndOxford Conf. on Microscopy of Semiconductor Materials, 1981, in Inst. Phys. Conf. Ser. 60, 409.Google Scholar
12 Cherns, D., Smith, D. A., Krakow, W. and Batson, P. E., Philos. Mag., 45 (1982) 107.Google Scholar
13 Krakow, W., Tan, T. Y., Föll, H., Cherns, D. and Smith, D. A., in Barley, G. W. (ed.), Proc. 39thAnnu. Electron Microscopy Society of America Meet., Atlanta, GA, 1981, Claitors' Publishing Division, Baton Rouge, LA, 1981, p. 116.Google Scholar
14 Krakow, W., IBM J.Res. Dev., 25(1981) 58.Google Scholar
15 Krakow, W., The direct observation of atomic surface structure and inclined planar defects in Au(111) films, Thin Solid Films, 93 (1982).Google Scholar
16 Föll, H., Ho, P. S. and Tu, K. N., IBM Res. Rep. 38059, 1981.Google Scholar