Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-26T17:20:38.904Z Has data issue: false hasContentIssue false
  • English
  • Français

Amorphous Silicon Based Particle Detectors

Published online by Cambridge University Press:  27 June 2011

N. Wyrsch ,
A. Franco ,
Y. Riesen ,
M. Despeisse ,
S. Dunand ,
F. Powolny ,
P. Jarron  and
C. Ballif
N. Wyrsch
Affiliation:
Ecole Polytechnique Fédérale de Lausanne (EPFL), Institute of Microengineering (IMT)
A. Franco
Affiliation:
Ecole Polytechnique Fédérale de Lausanne (EPFL), Institute of Microengineering (IMT)
Y. Riesen
Affiliation:
Ecole Polytechnique Fédérale de Lausanne (EPFL), Institute of Microengineering (IMT)
M. Despeisse
Affiliation:
Ecole Polytechnique Fédérale de Lausanne (EPFL), Institute of Microengineering (IMT)
S. Dunand
Affiliation:
Ecole Polytechnique Fédérale de Lausanne (EPFL), Institute of Microengineering (IMT)
F. Powolny
Affiliation:
Photovoltaics and thin film electronics laboratory, Breguet 2, 2000 Neuchâtel, Switzerland. CERN, CERN Meyrin, 1211 Genève 23, Switzerland.
P. Jarron
Affiliation:
Photovoltaics and thin film electronics laboratory, Breguet 2, 2000 Neuchâtel, Switzerland. CERN, CERN Meyrin, 1211 Genève 23, Switzerland.
C. Ballif
Affiliation:
Ecole Polytechnique Fédérale de Lausanne (EPFL), Institute of Microengineering (IMT)
Get access

Abstract

Radiation hard monolithic particle sensors can be fabricated by a vertical integration of amorphous silicon particle sensors on top of CMOS readout chip. Two types of such particle sensors are presented here using either thick diodes or microchannel plates. The first type based on amorphous silicon diodes exhibits high spatial resolution due to the short lateral carrier collection. Combination of an amorphous silicon thick diode with microstrip detector geometries permits to achieve micrometer spatial resolution beneficial for high accuracy beam positioning. Microchannel plates based on amorphous silicon were successfully fabricated and multiplication of electrons was observed. This material may solve some of the problems related to conventional microchannel devices. Issues, potential and limits of these detectors are presented and discussed.

Keywords

amorphousSisensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1321: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology , 2011 , mrss11-1321-a13-06
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Schade, H., in “Thin Film Silicon Solar” edited by Shah, A.. EPFL Press, 2010 Google Scholar
2. Perez-Mendez, V. et al. ., J. of Non-Cryst. Sol. 137&138 (1991) 1291.10.1016/S0022-3093(05)80360-6Google Scholar
3. Kishimoto, N. et al. ., J. Nucl. Mater. 258–263 (1998) 1908.Google Scholar
4. Srour, J. R. et al. ., IEEE Trans. Nucl. Sci. 45 (1998) 2624.10.1109/23.736506Google Scholar
5. Mendez, V. P. et al. ., Nucl. Instrum. Methods Phys. Res. A273 (1988) 127.10.1016/0168-9002(88)90807-8Google Scholar
6. Kim, et al. ., Int. J. of Prec. Engin. and Manuf. 9 (2008) 86.Google Scholar
7. Wyrsch, N. et al. ., MRS Proc. Symp. Vol. 869, 2005, 3–14.Google Scholar
8. Despeisse, M. et al. ., IEEE Trans. Nucl. Sci. 55 (2008) 805.10.1109/TNS.2008.918519Google Scholar
9. Miazza, C. et al. ., MRS Proc. Symp. Vol. 910 (2006) A17–03.10.1557/PROC-0910-A17-03Google Scholar
10. Wyrsch, N. et al. ., Sensors 8 (2008) 4656.10.3390/s8084656Google Scholar
11. Powolny, F., Ph.D. thesis, University of Neuchâtel, 2009.Google Scholar
12. Wyrsch, N. et al. ., MRS Proc. Symp. Vol. 1245, 2010, 193.10.1557/PROC-1245-A08-04Google Scholar
13. Wiza, J. L., Nucl. Instr. and Meth. 162, 1979, 587–601.10.1016/0029-554X(79)90734-1Google Scholar
14. Beetz, C. P. et al. ., Nucl. Instr. and Meth. In Phys. Res. A 442, 2000, 443–451.10.1016/S0168-9002(99)01271-1Google Scholar
15. Duanmu, Q. et al. ., Proc. of SPIE Vol. 4601, 2001, 284–287.10.1117/12.444697Google Scholar
16. Wyrsch, N. et al. ., MRS Proc. Symp. Vol. 869, 2005, 3–14.Google Scholar
17. http://www.gel.usherbrooke.ca/casino/What.html Google Scholar
18. Wyrsch, N. et al. ., MRS Proc. Symp. Vol. 808 (2004) 441.10.1557/PROC-808-A10.7Google Scholar
19. Cuony, P. et al. ., Appl. Phys. Lett. 97 (2010) 213502.10.1063/1.3517492Google Scholar
20. Cuony, P. et al. ., this volume.Google Scholar