Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-29T10:44:56.088Z Has data issue: false hasContentIssue false
  • English
  • Français

Amorphous and Metastable Phase Formation in Systems with Positive Heats of Mixing using High-Rate Sputter Deposition

Published online by Cambridge University Press:  25 February 2011

H. F. Rizzo ,
A. Echeverria ,
T. B. Massalski  and
H. Baxi
H. F. Rizzo
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
A. Echeverria
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
T. B. Massalski
Affiliation:
Carnegie-Mellon University, Pittsburgh, PA 15213
H. Baxi
Affiliation:
Carnegie-Mellon University, Pittsburgh, PA 15213
Get access

Abstract

The triode sputtering technique and a “split-target” arrangement were used to produce metastable crystalline and amorphous phases in the Cu-W, Mo-Cu, Ag-Fe, Ag-Cu, Pu-Ta and Pu-V systems. These systems all exhibit liquid and solid immiscibility and have positive heats of mixing and atomic radii that differ by at least 10%. The sputtered coatings, whose thickness varied between 25 and 200 microns, were formed at deposition rates between 35 and 200 Å/s. They were characterized using x-ray diffraction, TEM, microprobe, microhardness, and DSC techniques. The observed amorphous and metastable solid solution phases are discussed in terms of predicated heats of formation for these phases using Miedema's thermodynamic approximations [1] that include chemical, elastic, and structural contributions. Differences in compositional ranges observed by high rate sputter deposition compared to other vapor deposition techniques (e.g., coevaporation) appeared to arise as a result of processes that occur during deposition or immediately following deposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 128: Symposium A – Processing and Characterization of Materials Using Ion Beams , 1988 , 231
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Miedema, A.R. and Niessen, A.K., presented at the International Symposium on Non-equilibrium Solid Phases and Alloys, Kyoto, Japan, Mar. 1988, to be published.Google Scholar
2. Rizzo, H.F., Massalski, T.B., and McClanahan, E.D., Metall. Trans. 19A. 5 (1988).Google Scholar
3. Egami, T. and Waseda, Y., J. Non-Cryst. Solids 64,113 (1984).Google Scholar
4. Massalski, T.B. and Rizzo, H.F., presented at the International Symposium on Non-equilibrium Solid Phases and Alloys, Kyoto, Japan, Mar. 1988, to be published.Google Scholar
5. Saunders, N. and Miodownik, A.P., J. Mater. Sci. 22, 629 (1987).Google Scholar
6. Johnson, W.L., Mater. Sci. Eng. 97, 1 (1988).Google Scholar
7. Nastasi, M, Saris, F.W., Hung, L.S., and Mayer, J.W., J. Appl. Phys. 58, 3052 (1985).Google Scholar
8. Alonso, J.A. and Simozar, S., Sol. State Comm. 48 (9), 765 (1983).CrossRefGoogle Scholar
9. Liu, B.X., Phys. Stat. Sol. A 94, 11 (1986).Google Scholar
10. Swartzendruber, L.G., Bull. Alloy Phase Diagr. 5, 560 (1984).Google Scholar
11. Rizzo, H.F., Tanner, L.E., Wall, M.A., McClanahan, E.D., and Massalski, T.B., in Fundamentals of Beam-Solid Interactions and Transient Thermal Processing, edited by Aziz, M.J., Rehn, L.E., and Stritzker, B. (Mater. Res. Soc. Proc. 100, Pittsburgh, 1988), pp. 81–85.Google Scholar
12. Sumiyama, K., Kataoka, N.,and Nakamura, Y., Mater. Sci. Eng. 98, 343 (1988).Google Scholar
13. Chien, C.L. and Unruh, K.M., Phys. Rev. B. 28 (3), 1214 (1983).CrossRefGoogle Scholar
14. Giessen, W.C., Bull. Alloy Phase Diagr. 1, 43 (1980).CrossRefGoogle Scholar
15. Stoering, R. and Conrad, H., Acta Metall. 17, 933 (1969).CrossRefGoogle Scholar
16. Jankowski, A.F., The Strain Wave Approach to Modulus Enhancement and Stability of Metallic Multilayers, Lawrence Livermore National Laboratory, Livermore, Calif., UCRL-97446 (1987).Google Scholar
17. Barbee, T.W. Jr. and Keith, D.L., in Synthesis and Properties of Metastable Phases, edited by Machlin, E.S. and Rowland, T.J. (AIME, Pittsburgh, 1980), p. 73.Google Scholar
18. Dirks, A.G. and Broek, J.J. van der, J. Vac. Sci. Technol. A3 (6), 2618 (1985).Google Scholar
19. Rizzo, H.F., Echeverria, A.W., Wein, W., and Massalski, T.B., Mater. Sci. Eng. 98, 57 (1988).CrossRefGoogle Scholar
20. Miedema, A.R., deChatel, P.F., and deBoer, F.R., Physica 100B, 1 (1980).Google Scholar
21. Niessen, A.K., deBoer, F.R., deChatel, P.F., Mattens, W.C.M., and Miedema, A.R., CALPHAD 7, 51 (1983).Google Scholar
22. Subramanian, P.R. and Laughlin, D.E., Bull. Alloy Phase Diagr., in press.Google Scholar
23. Subramanian, P.R. and Laughlin, D.E., Bull. Alloy Phase Diagr., in press.Google Scholar
24. Chase, M.W., Bull. Alloy Phase Diagr. 4, 124 (1983).Google Scholar
25. Kaufman, L. and Bernstein, H., Computer Calculation of Phase Diagrams (Academic Press, New York, 1970).Google Scholar