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AlGaInN Quaternary Alloys by MOCVD

Published online by Cambridge University Press:  21 February 2011

F.G. Mcintosh ,
E. Piner ,
K. Boutros ,
J.C. Roberts ,
Y. He ,
M. Moussa ,
N. El-Masry  and
S.M. Bedair
F.G. Mcintosh
Affiliation:
ECE Department, North Carolina State University, Raleigh, North Carolina 27695-7911.
E. Piner
Affiliation:
MSE Department, North Carolina State University, Raleigh, North Carolina 27695-7916.
K. Boutros
Affiliation:
ECE Department, North Carolina State University, Raleigh, North Carolina 27695-7911.
J.C. Roberts
Affiliation:
ECE Department, North Carolina State University, Raleigh, North Carolina 27695-7911.
Y. He
Affiliation:
MSE Department, North Carolina State University, Raleigh, North Carolina 27695-7916.
M. Moussa
Affiliation:
Air Defense Academy, Alexandria, Egypt.
N. El-Masry
Affiliation:
MSE Department, North Carolina State University, Raleigh, North Carolina 27695-7916.
S.M. Bedair
Affiliation:
ECE Department, North Carolina State University, Raleigh, North Carolina 27695-7911.
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Abstract

AlGaInN quaternary alloy based devices can cover the emission wavelength from deep UV to red. This Quaternary alloy also offers lattice matched heterostructures for both optical and microwave devices. We will report on the MOCVD growth of AlxGa1−x-yInyN (0<x<0.12), (0<y<0.15) at 750 °C on sapphire substrates, using TMG, EDMIn, TMAl and NH3 precursors. Chemical composition, lattice constants and bandgaps of the grown films were determined by EDS, X-ray diffraction and room temperature PL. Data indicates that the lattice constants can also be deduced using Vegard's law, indicating a solid solution of this alloy. PL showed band edge emission, however emission from deep levels was also observed. Optimized growth conditions and heterostructures using this quaternary alloy will be presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 395: Symposium AAA – Gallium Nitride and Related Materials: The First International Symp , 1995 , 219
Copyright
Copyright © Materials Research Society 1996

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References

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