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Advanced Ti-Implanted Optical Waveguides in LiNbO3

Published online by Cambridge University Press:  25 February 2011

Ch. Buchal ,
P. R. Ashley ,
D. K. Thomas  and
B. R. Appleton
Ch. Buchal
Affiliation:
Solid State Div., Oak Ridge Natl. Lab., Oak Ridge TN 37831 also: IFF, KFA, D-5170 Jülich, W. Germany
P. R. Ashley
Affiliation:
US Army Missile, Lab., Redstone Arsenal, AL 35898
D. K. Thomas
Affiliation:
Solid State Div., Oak Ridge Natl. Lab., Oak Ridge TN 37831
B. R. Appleton
Affiliation:
Solid State Div., Oak Ridge Natl. Lab., Oak Ridge TN 37831
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Abstract

LiNbO3 is the best substrate for modulators and switches for integrated optics. Efficient low loss waveguides for light in LiNbO3 are formed by introducing Ti-ions into its lattice, thus increasing locally the ordinary and the extraordinary indices of refraction. We are the first to use the very versatile technique of ion-implantation to administer Ti into LiNbO3. This implantation process offers the possibility to introduce significantly more Ti into a well-defined volume than conventional diffusion techniques. During this process first an amorphous non-equilibrium phase is generated, which has to be kept at low temperatures in order to prevent segregation. Subsequent thermal treatment leads to solid phase epitaxy and restores the desired stable crystalline state. We have used this technique to fabricate excellent planar waveguides, channel waveguides and Mach-Zehnder modulators.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 88: Symposium P – Optical Fiber Materials and Properties , 1986 , 93
Copyright
Copyright © Materials Research Society 1987

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References

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