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Adhesion of Silver Films to Ion-Bombarded Alumina**
Published online by Cambridge University Press: 25 February 2011
Abstract
Silver films were deposited on alumina substrates using ion bombardment. Adhesion strength was measured as a function of deposition conditions, sputter-cleaning time, and bombarding ion species, using a pull-type adhesion tester. Argon- and argon/oxygen-ion sputtering produced large increases in adhesion strength, with the greatest increases occurring for oxygen-ion bombardment. Adhesion strength increased monotonically as a function of ion sputtering time. At a given deposition rate, further enhancement of adhesion is seen with concurrent ion bombardment.
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- Copyright © Materials Research Society 1990
Footnotes
Work supported by the U.S. Department of Energy, Energy Conversion and Utilization Technologies Division, under Contract W-31-109-Eng-38.
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