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Adhesion of Diamond Films on Various Substrates

Published online by Cambridge University Press:  21 February 2011

Tyan-Ywan Yen ,
Cheng-Tzu Kuo  and
S. E. Hsu
Tyan-Ywan Yen
Affiliation:
National Chiao Tung University, Institute of Mechanical Engineering, Hsinchu, Taiwan, R. O. C.
Cheng-Tzu Kuo
Affiliation:
National Chiao Tung University, Institute of Mechanical Engineering, Hsinchu, Taiwan, R. O. C.
S. E. Hsu
Affiliation:
Cheng Shan Institute of Science and Technology, Lungtan, Taiwan, R. O. C.
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Abstract

The adhesion as determined by indentation of diamond films deposited by microwave plasma-assisted CVD on various substrates was investigated. The critical loads for crack initiation and the propagation of the lateral crack under different loads were measured. The effects of the coating conditions and surface pretreatment of the substrate on the adhesion were examined.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 168 , 1989 , 207
Copyright
Copyright © Materials Research Society 1990

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