Hostname: page-component-cd9895bd7-lnqnp Total loading time: 0 Render date: 2024-12-27T01:47:33.571Z Has data issue: false hasContentIssue false
  • English
  • Français

Accurate Current Integration for Heavy Ion Rutherford Backscattering at University of North Texas

Published online by Cambridge University Press:  13 August 2012

Naresh T. Deoli  and
Duncan L. Weathers
Naresh T. Deoli
Affiliation:
Ion Beam Modification and Analysis Laboratory, Physics Department, University of North Texas, 76203, U.S.A.
Duncan L. Weathers
Affiliation:
Ion Beam Modification and Analysis Laboratory, Physics Department, University of North Texas, 76203, U.S.A.
Get access

Abstract

An experimental set up has been designed to suppress electron currents generated during energetic ion irradiation to obtain accurate current integration for Heavy Ion Rutherford Backscattering Spectroscopy (HIRBS) measurements of heavy element concentrations and target depth profiles. A combination of an electron trap to suppress any electrons ejected from beam collimators and slits, and a biased aluminum mesh to suppress any secondary electrons ejected from the target was used. Two samples that produce cleanly interpreted spectra have been used as targets to check the accuracy of the system for 3.0 and 4.5 MeV O+2 projectile ions. Details of the experimental set up and data are presented.

Keywords

ion beam analysisRutherford backscattering (RBS)thin film
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1474: Symposium CCC – Local Probing Techniques and In-Situ Measurements in Materials Science , 2012 , mrss12-1474-ccc08-06
Copyright
Copyright © Materials Research Society 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. O’Connor, D. J., Chunyu, T., Nucl. Instr. and Meth. B 36 (1989) 178.10.1016/0168-583X(89)90581-8Google Scholar
2. Knapp, J. A., Banks, J. C., Nucl. Instr. and Meth. B 79 (1993) 457.10.1016/0168-583X(93)95387-KGoogle Scholar
3. Dearnaley, G., Freeman, J. H., Nelson, R. S. and Stephen, J., Ion Implantation (North-Holland Publ. Co., New York, 1973) p. 416 Google Scholar
4. Matteson, S., Nicolet, M-A., Nucl. Instr. and Meth 160 (1979) 301.10.1016/0029-554X(79)90607-4Google Scholar
5. SRIM-2008 Computer program, based on J. F. Ziegler, J. P. Biersack, and U. Littmark, in The Stopping and Range of Ions in Matter, edited by J. Ziegler (Pergamon, New York, 1985).Google Scholar
6. L’Ecuyer, J., Davies, J. A. and Matsunami, N., Nucl. Instr. and Meth 160 (1979) 337.10.1016/0029-554X(79)90612-8Google Scholar