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Accuracy and Reproducibility of X-ray Texture Measurements on Thin Films

Published online by Cambridge University Press:  01 February 2011

Mark D. Vaudin ,
Glen R. Fox  and
Glen R. Kowach
Mark D. Vaudin
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
Glen R. Fox
Affiliation:
Ramtron International Corporation, Colorado Springs, CO 80921, USA
Glen R. Kowach
Affiliation:
Agere Systems, Breinigsville, PA, USA
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Abstract

Rocking curve texture measurements were made on thin films of zinc oxide (ZnO) and platinum (Pt) using a powder x-ray diffractometer, and, in the case of ZnO, an area detector. The intensity corrections for defocussing and other geometric factors were made using a technique and associated software (Texture Plus*) developed at NIST. In both thin film systems, the texture was axisymmetric (fiber) and sharp, with full width at half maximum values of about 2.5°. Care was taken in the Pt case to ensure that the linear range of the x-ray detector was used to measure the intensities; for the ZnO data the degree of detector non-linearity was determined, and corrections were applied where necessary. The suitability of the Pt films for thin film texture standards was studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 721: Symposia E/J – Texture and Microstructure in Electronic and Magnetic Films – Nanostructural Magnetic Materials for Data Storage , 2002 , J1.2
Copyright
Copyright © Materials Research Society 2002

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References

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