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Absence of a Steady State in Hydrogen Diluted Silane Plasmas Due to Mass Dependent Gas Pumping Speeds and Its Consequences

Published online by Cambridge University Press:  01 February 2011

G. Ganguly ,
G. Wood ,
J.N. Newton ,
M. Bennett ,
D.E. Carlson  and
R.R. Arya
G. Ganguly
Affiliation:
BP Solar, North America Technology Center, Toano, Virginia
G. Wood
Affiliation:
BP Solar, North America Technology Center, Toano, Virginia
J.N. Newton
Affiliation:
BP Solar, North America Technology Center, Toano, Virginia
M. Bennett
Affiliation:
BP Solar, North America Technology Center, Toano, Virginia
D.E. Carlson
Affiliation:
BP Solar, North America Technology Center, Toano, Virginia
R.R. Arya
Affiliation:
BP Solar, North America Technology Center, Toano, Virginia
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Abstract

We have investigated the cause for continued changes in the silane related species observed using mass spectroscopy during i-layer deposition process lasting several tens of minutes. Silane decomposition is found to influence the mass spectrometer filament and therefore, pressure changes were compared to ascertain differences in pumping speed using a rotary, mechanical pump. The cathode voltage was used as a measure of effective hydrogen to silane ratio in real time and deliberate tailoring of this ratio is seen to result in a discernible difference in the degradation of single junction amorphous silicon solar cells. Some obvious consequences of this subtle, pump-type dependent transient behavior are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 715: Symposium A – Amorphous and Heterogeneous Silicon-Based Films-2002 , 2002 , A1.4
Copyright
Copyright © Materials Research Society 2002

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References

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