Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-29T07:47:02.425Z Has data issue: false hasContentIssue false
  • English
  • Français

X-Ray Scattering Studies of Thin Films and Multilayers

Published online by Cambridge University Press:  03 September 2012

G. S. Cargill III
G. S. Cargill III*
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Hts., NY 10598
Get access

Abstract

X-ray scattering experiments provide important information about the atomic scale structure and the microstructure of thin films and multilayers. The high intensity, brightness, and broad energy spectrum of synchrotron radiation greatly extend capabilities of scattering experiments, particularly for scattering from ultrathin films and for anomalous dispersion scattering from alloys. Examples of scattering studies of both crystalline and amorphous materials are given in this overview.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 151: Symposium G – Growth, Characterization and Properties of Ultrathin Magnetic Films and Multilayers , 1989 , 231
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Guinier, A., X-Ray Diffraction, W. H. Freeman and Co., San Francisco, 1963.Google Scholar
2. Gibbs, D., Harshman, D. R., lsaacs, E. D., McWhan, D. B., Mills, D., and Vetter, C., Phys. Rev. Letters 61, 1241 (1988).CrossRefGoogle Scholar
3. Parratt, L. G., Phys. Rev. 95, 359 (1954).Google Scholar
4. Kim, K-J., in Physics of Particle Accelerators, AlP Conf. Proc. 184, Month, M. and Dienes, M., eds., American Institute of Physics, New York, 1989, p. 565.Google Scholar
5. Toney, M. F. and Thompson, C., “X-ray Reflectivity of Perfluoropolyether Polymer Molecules on Amorphous Carbon,” to be published. See also, Segmdiller, A., Thin Solid Films 18, 287 (1973).Google Scholar
6. Spiller, E. and Rosenbluth, A. E., Opt. Eng. 25, 954 (1986). See also, A. M. Kadin and J. E. Keem, Scripta Met. 20, 445 (1986).Google Scholar
7. Segmfiller, A., MRS Symp. Proc. 77, 151 (1987). See also, W. C. Marra, P. Eisenberger, and A. Y. Cho, J. Appl. Phys. 50, 6927 (1979).Google Scholar
8. Cargill, G. S. III, Angilello, J., and Kavanagh, K. L., Phys. Rev. Letters 61, 1748 (1988).Google Scholar
9. Fleming, R. M., McWhan, D. B., Gossard, A. C., Wiegmann, W., and Logan, R. A., J. Appl. Phys. 51, 357 (1980); D. B. McWhan, in Synthetic Modulated Structures, L. L. Chang and B. C. Giessen, eds., Academic Press, Orlando, 1985, p. 43.Google Scholar
10. Houghton, D. C., Baribeau, J-M., Song, K., and Perovic, D. D., MRS Symp. Proc. 130, 159 (1989).Google Scholar
11. K. F. Ludwig Jr., Warburton, W. K., Wilson, L., and Bienenstock, A. I., J. Chem. Phys. 87, 604 (1987).Google Scholar
12. Kortright, J. B. and Bienenstock, A., Phys. Rev. B 31, 2979 (1988); P. H. Fuoss, P. Eisenberger, W. K. Warburton, and A. Bienenstock, Phys. Rev. Letters 46, 1537 (1981).Google Scholar