Hostname: page-component-5cf477f64f-zrtmk Total loading time: 0 Render date: 2025-04-03T04:35:58.765Z Has data issue: false hasContentIssue false
  • English
  • Français

X-RAY MONITORING OF InGaAsP LAYERS GROWN BY VAPOR PHASE EPITAXY

Published online by Cambridge University Press:  28 February 2011

A. T. MACRANDER  and
K. STREGE
A. T. MACRANDER
Affiliation:
AT&T Bell Laboratories, Murray Hill, N.J., 07974
K. STREGE
Affiliation:
AT&T Bell Laboratories, Murray Hill, N.J., 07974
Get access

Abstract

X-ray double crystal diffractometry provides a means of rapidly characterizing epitaxial structures. Because the technique is rapid and nondestructive and because it yields a wealth of information, rocking curves have been routinely obtained and extensively studied by us. We present here selective results illustrating the typical progression in layer quality which occurs from the initial growth in a reactor to the growth of device quality material.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 56: Symposium H – Layered Structures and Epitaxy , 1985 , 115
Copyright
Copyright © Materials Research Society 1986

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Macrander, A. T. and Chu, S. N. G., Mat. Res. Soc. Symp. Proc. 25,491 (1984).Google Scholar
[2] Macrander, A. T., Chu, S. N. G., Strege, K. E., Bloemeke, A. F., and Johnston, W. D., Jr., Appl. Phys. Lett. 44, 615 (1984).CrossRefGoogle Scholar
[3] Chu, S. N. G., Macrander, A. T., Strege, K. E., and Johnston, W. D., Jr., J. Appl. Phys. 57, 249 (1985).CrossRefGoogle Scholar
[4] Macrander, A. T., Bonner, W. A., and E. M. Monberg (unpublished).Google Scholar
[5] Macrander, A. T. and Strege, K. E., J. Appl. Phys. J. Appl. Phys. 59, 442 (1986).CrossRefGoogle Scholar
[6] Mizutani, T. and Watanabe, H., J. Cryst. Growth 59, 507 (1982).CrossRefGoogle Scholar
[7] Strege, K. and M. Washington (unpublished).Google Scholar
[8] Berreman, D. W., Phys. Rev. B14, 4313 (1976).CrossRefGoogle Scholar
[9] Halliwell, M. A. G., Lyons, M. H., and Hill, M. J., J. Cryst. Growth 68, 523 (1984).CrossRefGoogle Scholar
[10] Zachariasen, W. H., “Theory of X-ray Diffraction in Crystals,” Dover Publications, New York, 1967.CrossRefGoogle Scholar