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When Organometallic Chemistry and Metal Oxide Nanoparticles Meet Optimized Silicon-based Gas Sensor
Published online by Cambridge University Press: 01 February 2011
Abstract
A robust silicon gas sensor chip (platinum heater, low deformation membrane) has been designed and successfully operated with various metal oxide nanoparticles synthesized by an organometallic route (SnO2, ZnO) and deposited by a generic ink-jet method. High quality and micron thick layers are obtained and the CO gas sensitivity is presented.
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- Copyright © Materials Research Society 2010