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Visualization of Temperature Profiles in a-Si Crystallized in the Explosive Mode by Ow Laser.

Published online by Cambridge University Press:  15 February 2011

Michel Rivier ,
Andras Cserhati  and
George Goetz
Michel Rivier
Affiliation:
Bendix Advanced Technology Center, Columbia MD. 21045 USA
Andras Cserhati
Affiliation:
Bendix Advanced Technology Center, Columbia MD. 21045 USA
George Goetz
Affiliation:
Bendix Advanced Technology Center, Columbia MD. 21045 USA
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Abstract

We present an experimental method, based on the isothermal nature of the boundaries of explosively crystallized silicon, to display instantaneous isotherms produced by fast scanning laser beams. This method is especially useful for the case of multilayer structures or complex geometries, where thermal profiles simulation is a difficult problem. We can also obtain directly a measure of the spatial intensity distribution in the laser beam.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 13 , 1982 , 185
Copyright
Copyright © Materials Research Society 1983

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References

REFERENCES

1.Stultz, T. J., Gibbons, J. F., Appl. Phys. Lett. 39, 6 (1981).Google Scholar
2.Lax, M., J. Appl. Phys. 48, 3919 (1977).Google Scholar
3.Lax, M., Appl. Phys. Lett. 33, 786 (1978).Google Scholar
4.Nissim, Y. I. et al. , J. Appl. Phys. 51, 274 (1980).Google Scholar
5.Burgener, M. L., Reedy, R. E., J. Appl. Phys. 53, 4357 (1982).Google Scholar
6.Moody, J. E., Hendel, R. H., J. Appl. Phys. 53, 4364 (1982).Google Scholar
7.Fan, J. C. C. et al. , Appl. Phys. Lett. 36, 158 (1980).Google Scholar
8.Leamy, H. J. et al. , Appl. Phys. Lett. 38, 137 (1981).Google Scholar
9.Auvert, G. et al. , Appl. Phys. Lett. 39, 724 (1981).Google Scholar
10.Auvert, G. et al. , Appl. Phys. Lett. 38, 613 (1981).Google Scholar
11.Auvert, G. et al. in: Laser and electron-beam interactions with solids, Appleton, B. R., Celler, G. R. eds. (North Holland, New York 1982) pp 535–546.Google Scholar
12.Benschel, D. et al. in: Laser and electron-beam interactions with solids, Appleton, B. R., Celler, G. R. eds. (North Holland, New York 1982) pp 541–546.Google Scholar