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Viscosity, Structural Relaxation and Defect Annihilation Kinetics of Amorphous Si

Published online by Cambridge University Press:  26 February 2011

Ann Witvrouw  and
Frans Spaepen
Ann Witvrouw
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138
Frans Spaepen
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138
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Abstract

Substrate curvature measurements were used to monitor viscous flow in ion beam sputtered amorphous Si for temperatures ranging from 150 to 400 °C. The viscosity increases linearly with time, characteristic of a bimolecular defect annihilation process. This is consistent with the defects governing viscous flow being dangling bonds. The isoconfigurational activation enthalpy for the viscosity is 1.8 ±.3 eV.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 205: Symposium F – Kinetics of Phase Transformations , 1990 , 21
Copyright
Copyright © Materials Research Society 1992

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References

1. Roorda, S., Ph.D. Thesis, Rijksuniversiteit te Utrecht, The Netherlands (1990).Google Scholar
2. Roorda, S., Doom, S., Sinke, W.C., Scholte, P.M.L.O., and Loenen, E. van, Phys. Rev. Lett. 62, 1880 (1989).CrossRefGoogle Scholar
3. Donovan, E.P., Spaepen, F., Poate, J.M., and Jacobson, D.C., Appl. Phys. Lett. 55 (15), 1516 (1989).CrossRefGoogle Scholar
4. Park, B., Ph.D. Thesis, Harvard University, U.S.A. (1989).Google Scholar
5. Sinke, W.C., Roorda, S. and Saris, F., J. Mater. Res. 3, 1201 (1988).Google Scholar
6. Hubler, G.K., Donovan, E.P., Wang, K.W., and Spitzer, W.G., SPIE 530, 222 (1985).Google Scholar
7. Donovan, E.P., Hubler, G.K., and Wadell, C.N., Nucl. Instrum. Methods B 19, 590 (1987).Google Scholar
8. Roorda, S., Poate, J.M., Jacobson, D.C., Eaglesham, D.J., Dennis, B.S., Dierker, S., Sinke, W.C., and Spaepen, F., Solid State Communications 75 (3), 197 (1990).Google Scholar
9. Roorda, S., Sinke, W.C., Poate, J.M., Jacobson, D.C., Dierker, S., Dennis, B.S., Eaglesham, D.J., and Spaepen, F. in Beam-Solid Interactions: Physical Phenomena, edited by Bergesen, P., Knapp, J.A., and Zuhr, R.A. (Mater. Res. Soc. Proc. 157, Boston, MA 1990), 683.Google Scholar
10. Scherer, G.W., Relaxation in Glass and Composites, (John Wiley & Sons, New York, 1986), 149.Google Scholar
11. Witvrouw, A., and Spaepen, F. in Thin Films: Stresses and Mechanical Properties, edited by Doerner, M.F., Oliver, W.C., Pharr, G.M., Brotzen, F.R. (Mater. Res. Soc. Proc. 188, San Fransisco, CA 1990), 147.Google Scholar
12. Nix, W.D., Metall. Trans. A 20A, 2217 (1989).Google Scholar
13. Flinn, P.A., Gardner, D.S., and Nix, W.D., IEEE Trans. Electron Devices ED–34 (3), 689 (1987).Google Scholar
14. Doerner, M.F., and Nix, W.D., CRC Critical Reviews in Solid State and Materials Science 14 225 (1988).Google Scholar
15. Custer, J.S, Thompson, M.O., Jacobson, D.C., Poate, J.M., Roorda, S., Sinke, W.C., and Spaepen, F. in Beam-Solid Interactions: Physical Phenomena, edited by Børgesen, P., Knapp, J.A., and Zuhr, R.A. (Mater. Res. Soc. Proc. 157, Boston, MA 1990), 689.Google Scholar
16. Roberts, G.J., and Roberts, J.P., 7th Int. Conf. on Glass, 1965, 31.Google Scholar
17. Lillie, H.R., J. Am. Ceram. Soc. 16, 619 (1933).CrossRefGoogle Scholar
18. Tsao, S.S. and Spaepen, F., Acta Met. 33, 881 (1985).CrossRefGoogle Scholar
19. Jiang, X., Goranchev, B., Schmidt, K., Grifnberg, P., and Reichelt, K., J.Appl.Phys. 67 (11), 6772 (1990).Google Scholar
20. Huntington, H.B., in Solid state Physics 7, edited by Seitz, F. and Turnbull, D. (Academic Press Inc., Publishers, New York 1958), 322.Google Scholar
21. Witvrouw, A., Volkert, C.A., Spaepen, F., Mat. Sci. Eng. (Proc. RQ7, Stockholm, Sweden 1990), in press.Google Scholar
22. Spaepen, F., in Physics of Defects, edited by Balian, R. et al. (Les Houches Lectures XXXV, North-Holland, Amsterdam, 1981), 154.Google Scholar