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Vertically Aligned Carbon Nanotube Arrays for Room Temperature Gas Sensors

Published online by Cambridge University Press:  01 February 2011

Suresh Rajaputra ,
Raghu Mangu ,
Ning Ma ,
Patricia Clore ,
Dali Qian ,
Rodney Andrews ,
Sovannary Phok ,
Janet Lumpp  and
Vijay Singh
Suresh Rajaputra
Affiliation:
[email protected], University of Kentucky, Electrical & Computer Engneering, 453 Anderson Hall, Lexington, KY, 40506-0046, United States, (859) 218 - 6552, (859) 257 - 2489
Raghu Mangu
Affiliation:
[email protected], University of Kentucky, Electrical & Computer Engneering, 453 Anderson Hall, Lexington, KY, 40506-0046, United States
Ning Ma
Affiliation:
[email protected], University of Kentucky, Electrical & Computer Engneering, 453 Anderson Hall, Lexington, KY, 40506-0046, United States
Patricia Clore
Affiliation:
[email protected], University of Kentucky, Electrical & Computer Engneering, 453 Anderson Hall, Lexington, KY, 40506-0046, United States
Dali Qian
Affiliation:
[email protected], University of Kentucky, Center for Applied Energy Research, 2540 Research Park Drive, Lexington, KY, 40511-8479, United States
Rodney Andrews
Affiliation:
[email protected], University of Kentucky, Center for Applied Energy Research, 2540 Research Park Drive, Lexington, KY, 40511-8479, United States
Sovannary Phok
Affiliation:
[email protected], University of Kentucky, Electrical & Computer Engneering, 453 Anderson Hall, Lexington, KY, 40506-0046, United States
Janet Lumpp
Affiliation:
[email protected], University of Kentucky, Electrical & Computer Engneering, 453 Anderson Hall, Lexington, KY, 40506-0046, United States
Vijay Singh
Affiliation:
[email protected], University of Kentucky, Electrical & Computer Engneering, 453 Anderson Hall, Lexington, KY, 40506-0046, United States
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Abstract

Vertically aligned multiwalled carbon nanotube (CNT) arrays were fabricated in anodized aluminum oxide (AAO) templates without the use of a catalyst, using xylene pyrolysis. The CNT arrays in AAO template were integrated into a resistive sensor design. The sensors were found to be highly responsive to NH3 and NO2 with steady state sensitivities of 5% and 10% for 100ppm of NH3 and NO2 respectively, at room temperature. Results were interpreted in terms of the CNTs acting as p-type semiconductors. A study was undertaken to elucidate the dependence of sensitivity on the thickness of the conducting amorphous carbon layers on top and bottom. Recovery of the MWNT gas sensor was studied for different types of desorption techniques. The thickness of the amorphous carbon layer (sheet resistance) was found to be critical in determining the sensor response.

Keywords

nanostructuresensorchemical vapor deposition (CVD) (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1057: Symposium II – Nanotubes and Related Nanostructures , 2007 , 1057-II20-08
Copyright
Copyright © Materials Research Society 2008

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