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Vapour Pressure Measurements on Organotellurium Precursors for Movpe

Published online by Cambridge University Press:  21 February 2011

J.E. Hails ,
S.J.C. Irvine  and
J.B. Mullin
J.E. Hails
Affiliation:
Royal Signals & Radar Establishment, St Andrews Road, Malvern, Worcs, WR14 3PS, UK
S.J.C. Irvine
Affiliation:
Royal Signals & Radar Establishment, St Andrews Road, Malvern, Worcs, WR14 3PS, UK
J.B. Mullin
Affiliation:
Royal Signals & Radar Establishment, St Andrews Road, Malvern, Worcs, WR14 3PS, UK
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Abstract

Before an organometallic compound can be used as an MOVPE precursor, certain basic properties need to be known and one of the most important of these is vapour pressure. A technique for the measurement of vapour pressures using an MOVPE system designed for precursor assessment is described. Results on the assessment of di-is-propyl-telluride, di-n-propyl-telluride, di-allyl-telluride, methyl-allyl-telluride and di-t-butyl-telluride are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 161: Symposium E – Properties of II-VI Semiconductors: Bulk Crystals, Epitaxial Films, Quantum Well Structures, and Dilute Magnetic Systems , 1989 , 343
Copyright
Copyright © Materials Research Society 1990

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References

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