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Vaporization Chemistry of Organoaluminum Precursors to Ain
Published online by Cambridge University Press: 22 February 2011
Abstract
We have used the technique of molecular beam mass spectrometry, with time of flight measurement, to study the vaporization of two organoaluminum precursors to AIN. The compounds studied were the isomers (CH3)3Al·NH3 (I) and (CH3)3N·AIH3 (II). Compound I was synthesized in house by reaction of (CH3)3Al with NH3. Compound II was obtained commercially. Mass spectrometric measurements of Compound I indicated a room temperature vapor pressure below 1 Torr, and slow decomposition at room temperature to yield CH4 and a solid product, identified as the trimer, [(CH3)2AlNH2]3, as well as possible concentrations of the corresponding monomer and dimer. Similar measurements on Compound II indicated partial decomposition to metallic aluminum and gaseous trimethylamine and hydrogen.
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- Copyright © Materials Research Society 1994