Hostname: page-component-cd9895bd7-hc48f Total loading time: 0 Render date: 2024-12-27T01:52:33.756Z Has data issue: false hasContentIssue false
  • English
  • Français

Uv Laser-Induced Etching of the First-Row Transition Metals

Published online by Cambridge University Press:  21 February 2011

George W. Tyndall
George W. Tyndall*
Affiliation:
IBM Almaden Research Center, 650 Harry Rd., San Jose, CA 95120
Get access

Abstract

The 248 nm excimer laser-induced etching of Ti, Cr, Fe, Co, Ni, and Cu by Br2 has been studied. The experiment consists of focusing the pulsed UV laser beam at normal incidence onto the surface of a quartz crystal microbalance (QCM) coated with 1μm of polycrystalline metal. Absolute etch rates are determined as a function of the Br2 pressure and the laser fluence. On the basis of the kinetic information, four mechanisms are proposed to explain the etching of these transition metals.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 158: Symposium B – In-Situ Patterning: Selective Area Deposition and Etching , 1989 , 47
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Tyndall, G.W. and Moylan, C.R., Appl. Phys. A, submitted.Google Scholar
2. Burgess, D., Stair, P.C., and Weitz, E., J. Vac. Sci. Technol. A4, 1362 (1986).Google Scholar
3. Colton, R. and Canterford, J. H., Halides of the First Row Transition Metals (Wiley-Interscience, London, 1969).Google Scholar
4. Koren, G. and Hurst, J. E. Jr., Appl. Phys. A 45, 301 (1988).Google Scholar
5. Nakayama, T., Surf. Sci. 133, 101 (1983).Google Scholar
6. Ritsko, J. J., Ho, F., and Hurst, J., Appl. Phys. Lett., 53, 78, (1988).Google Scholar