No CrossRef data available.
Article contents
Unstable Etching Of Si(110)with Potassium Hydroxide
Published online by Cambridge University Press: 17 March 2011
Abstract
We present the experimental data for the morphological evolution of Si(110) etched with Potassium Hydroxide. The observed results are interpreted using a continuum equation. The results reveal the presence of unstable etching, which leads to the formation of a columnar structure on the surface. The early stage of the formation of this columnar structure can be explained by a linear theory. This instability is caused by anisotropic surface tension.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 2001