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Uniform And Large Area Deposition Of Diamond-Like Carbon Using Rf Source Ion Beam

Published online by Cambridge University Press:  21 February 2011

Richard L.C. Wu ,
William Lanter ,
K. Miyoshi ,
S.L. Heidger ,
P. Bletzinger  and
A. Garscadden
Richard L.C. Wu
Affiliation:
UES, Inc. Dayton, OH 45432
William Lanter
Affiliation:
UES, Inc. Dayton, OH 45432
K. Miyoshi
Affiliation:
NASA Lewis Research Center, Cleveland, OH 44135
S.L. Heidger
Affiliation:
NASA Lewis Research Center, Cleveland, OH 44135
P. Bletzinger
Affiliation:
Wright Laboratory (WL/POOC-3), WPAFB, OH 45433
A. Garscadden
Affiliation:
Wright Laboratory (WL/POOC-3), WPAFB, OH 45433
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Abstract

We have designed and constructed a large area ion beam apparatus to deposit DLC films onto 1000 cm2 surfaces with various geometries. The use of an efficient RF excited ion gun (13.56 MHz, 1 kW power, 50-3000 eV ion energy) with a diameter of 20 cm, enables us to generate various hydrocarbon ions with high ion beam currents, varying ionic species and less maintenance. The use of a four axis (Χ-ϒ-Θϒ-ΘZ) substrate scanner with computer control can produce uniform DLC films on large areas and curved surfaces. The effects of RF power, ion energy, gaseous composition, and total pressure on the properties of DLC have been systematically investigated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 354: Symposium A – Beam Solid Interactions for Materials Synthesis and Characterization , 1994 , 63
Copyright
Copyright © Materials Research Society 1995

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References

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