Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-29T07:44:29.176Z Has data issue: false hasContentIssue false

Ultra-Fast Melting and Solidification Behaviour of Amorphous and Crystalline Silicon

Published online by Cambridge University Press:  22 February 2011

A.G. Cullis
Affiliation:
Royal Signals and Radar Establishment, Malvern, Worcs. WR14 3PS, England
H.C. Webber
Affiliation:
Royal Signals and Radar Establishment, Malvern, Worcs. WR14 3PS, England
N.G. Chew
Affiliation:
Royal Signals and Radar Establishment, Malvern, Worcs. WR14 3PS, England
Get access

Abstract

Subnanosecond ultra-violet radiation pulses are used to produce relatively thick, large area amorphous layers onSi crystals by transient melting and solidification. The different behaviours of (001) and (111) Si orientations are highlighted. Observations of crystal growth phenomena during solidification at velocities lower than required for amorphization are correlated with theoretical predictions. Computer modelling of heat flow in amorphous silicon is refined.

Type
Research Article
Copyright
Copyright © Materials Research Society 1984

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Tsu, R., Hodgson, R.T., Tan, T.Y. and Baglin, J.E., Phys. Rev. Lett. 42, 1356 (1979).Google Scholar
2.Lin, P.L., Yen, R., Bloembergen, N. and Hodgson, R.T., Appl. Phys. Lett. 34, 864 (1979).Google Scholar
3.Cullis, A.G., Webber, H.C., Chew, N.G., Poate, J.M. and Baeri, P., Phys. Rev. Lett. 49, 219 (1982).Google Scholar
4.Thompson, M.O., Mayer, J.W., Cullis, A.G., Webber, H.C., Chew, N.G., Poate, J.M. and Jacobson, D.C., Phys. Rev. Lett. 50, 896 (1983).Google Scholar
5.Cullis, A.G., Webber, H.C. and Chew, N.G. in: Microscopy of Semiconducting Materials 1983, Cullis, A.G., Davidson, S.M. and Booker, G.R. eds. (Institute of Physics, Bristol 1983) pp. 167172.Google Scholar
6.Jackson, K.A. in: Proceedings of NATO Institute on Surface Modification and Alloying, Poate, J.M., Foti, G. and Jacobson, D.C. eds. (Plenum Press, New York 1983) pp. 5179.Google Scholar
7.Baeri, P. and Campisano, S.U. in: Laser Annealing of Semiconductors, Poate, J.M. and Mayer, J.W. eds. (Academic Press, New York 1982) pp. 75109.Google Scholar
8.Wood, R.F. and Giles, G.E., Phys. Rev. B 23, 2923 (1981).Google Scholar
9.Cullis, A.G., Webber, H.C. and Chew, N.G., Appl. Phys. Lett. 36, 547 (1980).Google Scholar
10.Webber, H.C., Cullis, A.G. and Chew, N.G., Appl. Phys. Lett. 43, 669 (1983).Google Scholar
11.Donovan, E.P., Spaepen, F., Turnbull, D., Poate, J.M. and Jacobson, D.C., Appl. Phys. Lett. 42, 698 (1983).Google Scholar