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Transmission Characterization of Drilled Alternating-Layer Three-Dimensional Photonic Crystals

Published online by Cambridge University Press:  21 March 2011

Eiichi Kuramochi ,
Masaya Notomi ,
Itaru Yokohama ,
Jun-ichi Takahashi ,
Chiharu Takahashi ,
Takayuki Kawashima  and
Shojiro Kawakami
Eiichi Kuramochi
Affiliation:
NTT Basic Research Laboratories, NTT Corporation, 3–1 Morinosato Wakamiya, Atsugi-shi, 243–0198, Japan.
Masaya Notomi
Affiliation:
NTT Basic Research Laboratories, NTT Corporation, 3–1 Morinosato Wakamiya, Atsugi-shi, 243–0198, Japan.
Itaru Yokohama
Affiliation:
NTT Basic Research Laboratories, NTT Corporation, 3–1 Morinosato Wakamiya, Atsugi-shi, 243–0198, Japan.
Jun-ichi Takahashi
Affiliation:
NTT Telecommunications Energy Laboratories, NTT Corporation, 3–1 Morinosato Wakamiya, Atsugi-shi, 243–0198, Japan.
Chiharu Takahashi
Affiliation:
NTT Telecommunications Energy Laboratories, NTT Corporation, 3–1 Morinosato Wakamiya, Atsugi-shi, 243–0198, Japan. NTT Advanced Technology Corporation, 3–1 Morinosato Wakamiya, Atsugi-shi, 243–0198, Japan.
Takayuki Kawashima
Affiliation:
NICHe, Tohoku University, Aramaki Aza Aoba 04, Aoba-ku, Sendai, 980–8579 Japan.
Shojiro Kawakami
Affiliation:
NICHe, Tohoku University, Aramaki Aza Aoba 04, Aoba-ku, Sendai, 980–8579 Japan.
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Abstract

We propose a new three-dimensional photonic crystal structure or drilled alternating-layer photonic crystal (DALPC), which can be fabricated by a combination of the deposition of alternating layers of dielectric films and one-time dry etching. Our band calculation predicts that the DALPC has a photonic band gap (PBG) in all directions. We fabricated a Si/SiO2DALPC by electron beam lithography, bias sputtering, and fluoride-gas electron cyclotron resonance etching. We measured the light transmission of the DALPC sample in both the in-plane and vertical directions. We observed a transmission minimum around the 1.4-μm-wavelength for all measured directions and TE/TM polarizations, which demonstrated a potential of the DALPC as a three-dimensional PBG material.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 692: Symposium H – Progress in Semiconductor Materials for Optoelectronic Applications , 2001 , K2.8.1
Copyright
Copyright © Materials Research Society 2002

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References

1. Joannopoulos, J. D., Meade, R. D., and Winn, J. N., Photonic Crystals (Princeton University Press, New Jersey, 1996).Google Scholar
2. Blanco, A., Chomski, E., Grabtchak, S., Iblsate, M., John, S., Leonard, S. W., Lopez, C., Meseguer, F., Mlguez, H., Mondla, J. P., Ozin, G. A., Toader, O., and Driel, H. M van, Nature 405, 437 (2000)Google Scholar
3. Vlasov, Y. A., Bo, X-Z., Strum, J. C., and Norris, D. J, Nature 414, 289 (2001)Google Scholar
4. Ho, K. M., Chan, C. T., Soukoulis, C. M., Biswas, R., and Sigalas, M., Solid State Commun. 89, 413 (1994).Google Scholar
5. Sozuer, H. S. and Dowling, J. P., J. Mod. Opt. 41, 231 (1994).Google Scholar
6. Lin, S. Y., Fleming, J. G., Hetherington, D. L., Smith, B. K., Biswas, R., Ho, K. M., Sigalas, M. M, Zubrzycki, W., Kurtz, S. R., and Bur, J., Nature 394, 251 (1998)Google Scholar
7. Noda, S., Tomoda, K., Yamamoto, N. and Chutinan, A.. Science 289, 604–606, 2000.Google Scholar
8. Notomi, M., Tamamura, T., Kawashima, T., and Kawakami, S., Appl. Phys. Lett. 77, 4256 (2000).Google Scholar
9. Kuramochi, E., Notomi, M., Tamamura, T., Kawashima, T., Kawakami, S., Takahashi, J., and Takahashi, C., J. Vac. Sci. Technol. B 18, 3510 (2000).Google Scholar
10. Kawakami, S., Electron. Lett. 33, 1260 (1997).Google Scholar
11. Kawakami, S., Kawashima, T. and Sato, T.. Appl. Phys. Lett. 74, 463–465, 1999.Google Scholar
12. Takahashi, C., Jin, Y., Nishimura, K., and Matsuo, S., Jpn. J. Appl. Phys. 39,3672–3676, 2000.Google Scholar