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Trace Water Detection in Phosphine By Cavity Ring-down Spectroscopy

Published online by Cambridge University Press:  11 February 2011

Susan Y. Lehman ,
Kris A. Bertness  and
Joseph T. Hodges
Susan Y. Lehman
Affiliation:
National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305
Kris A. Bertness
Affiliation:
National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305
Joseph T. Hodges
Affiliation:
National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899
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Abstract

We are using cavity ring-down spectroscopy (CRDS) to measure concentrations of water in nitrogen and, for the first time to our knowledge, in phosphine. Water vapor concentrations have been measured in purified and unpurified phosphine, indicating a water mole fraction of (22.0 ± 1.0) x 10-6 in unpurified phosphine. After purification with an in-line, chemically-reactive purifier, the mole fraction of water in phosphine was less than 0.1 × 10-6. Mole fractions as high as (730 ± 60) × 10-6 have been measured in unpurified phosphine, suggesting that the H2O vapor concentration increases substantially with time as the gas is stored in a cylinder. The materials properties of AlInP grown by molecular beam epitaxy (MBE) with CRDS-characterized PH3 were found to be relatively insensitive to water contamination at the 22 mol/mol level.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 744: Symposium M – Progress in Semiconductors II–Electronic and Optoelectronic Applications , 2002 , M7.8
Copyright
Copyright © Materials Research Society 2003

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References

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