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Three Dimensional Surface Waviness of an Epitaxial Layer Due to Surface Diffusion Induced by Interface Misfit Dislocations

Published online by Cambridge University Press:  21 February 2011

F. Jonsdottir
F. Jonsdottir*
Affiliation:
Institute for Mechanics and Materials, University of California, San Diego La Jolla, CA 92093-0404
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Abstract

It has been observed that, for some strained epitaxial layer systems, the surface of the layer develops roughness or waviness which correlates spatially with the positions of underlying interface misfit dislocations which partially relax the elastic mismatch strain. A model based on redistribution of mass by surface diffusion is analyzed to estimate the waviness of the three dimensional thermodynamic equilibrium surface due to intersecting arrays of interface misfit dislocations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 356: Symposium B2 – Thin Films: Stresses and Mechanical Properties V , 1994 , 45
Copyright
Copyright © Materials Research Society 1995

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