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Three Dimensional Hydrogen Microscopy in Diamond

Published online by Cambridge University Press:  01 February 2011

Günther Dollinger ,
Patrick Reichart ,
Andreas Bergmaier ,
Andreas Hauptner  and
Christoph Wild
Günther Dollinger
Affiliation:
Universität der Bundeswehr München, LRT 2, D-85579 Neubiberg, Germany
Patrick Reichart
Affiliation:
University of Melbourne, School of Physics, Victoria 3010, Australia
Andreas Bergmaier
Affiliation:
Universität der Bundeswehr München, LRT 2, D-85579 Neubiberg, Germany
Andreas Hauptner
Affiliation:
Technische Universität München, Physik Department E12, 85748 Garching
Christoph Wild
Affiliation:
Frauenhofer Institut Angewandte Festkörperphysik, 79108 Freiburg
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Abstract

We introduce proton-proton scattering at a microprobe of 17 MeV protons to quantitatively image three dimensional hydrogen distributions in polycrystalline diamond at a lateral resolution better than 1 μm and high sensitivity. The images show that most of the hydrogen of a <110>-textured undoped polycrystalline diamond film is located at grain boundaries. The average amount of hydrogen is (8.1±1.5)·1014 atoms/cm2 along the grain boundaries which corresponds to about a third of a monolayer. The content within the grain is below the detection limit of 1.4·1016 atoms/cm2 (0.08 at-ppm).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 864: Symposium E – Semiconductor Defect Engineering-Materials, Synthesis Structures and Devices , 2005 , E11.1
Copyright
Copyright © Materials Research Society 2005

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