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Thin Nano- and Microcrystalline CVD Diamond Films for Micro-channel Cooling: Thermal and Elastic Properties

Published online by Cambridge University Press:  11 March 2011

Robbe Salenbien ,
Jan Sermeus ,
Paulius Pobedinskas ,
Christ Glorieux  and
Ken Haenen
Robbe Salenbien
Affiliation:
Katholieke Universiteit Leuven, Departement Natuurkunde, Laboratorium voor Akoestiek en Thermische Fysica, Leuven, Belgium
Jan Sermeus
Affiliation:
Katholieke Universiteit Leuven, Departement Natuurkunde, Laboratorium voor Akoestiek en Thermische Fysica, Leuven, Belgium
Paulius Pobedinskas
Affiliation:
Hasselt University, Institute for Materials Research (IMO), Diepenbeek, Belgium
Christ Glorieux
Affiliation:
Katholieke Universiteit Leuven, Departement Natuurkunde, Laboratorium voor Akoestiek en Thermische Fysica, Leuven, Belgium
Ken Haenen
Affiliation:
Hasselt University, Institute for Materials Research (IMO), Diepenbeek, Belgium IMEC vzw, Division IMOMEC, Diepenbeek, Belgium
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Abstract

Thin nano- to microcrystalline diamond (N/MCD) films were deposited on silicon substrates using plasma enhanced microwave chemical vapor deposition. Selected layers were covered with a thin metal layer of Cr to enhance their optical absorption characteristics for photothermal and photoacoustic experiments. A heterodyne diffraction method was used to investigate the thermoelastic signatures of the N/MCD layers. While the dispersion of surface acoustic waves turned out to be difficult to determine due to high optical scattering from the diamond crystallites, it was found that a diamond film of ~ 2 μm thick is enhancing the thermal diffusion along the surface.

Keywords

diamondthermal conductivitynanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1282: Symposium A – Diamond Electronics and Bioelectronics—Fundamentals to Applications IV , 2011 , mrsf10-1282-a15-02
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

1. Twitchen, D.J., Pickles, C.S.J., Coe, S.E., Sussmann, R.S., Hall, C.E., Diamond Relat. Mater. 10 (3-7), 731–735 (2001).Google Scholar
2. Wörner, E., Pleuler, E., Wild, C., Koidl, P., Diamond Relat. Mater. 12 (3-7), 744–748 (2003).Google Scholar
3. Williams, O.A., Nesládek, M., Daenen, M., Michaelson, S., Hoffman, A., Ōsawa, E., Haenen, K., Jackman, R.B., Diamond Relat. Mater. 17(7-10), 1080–1088 (2008).Google Scholar
4. Philip, J., Hess, P., Feygelson, T., Butler, J.E., Chattopadhyay, S., Chen, K.H., Chen, L.C., J. Appl. Phys. 93 (4), 2164–2171 (2005).Google Scholar
5. Wild, C., Koidl, P., Müller-Sebert, W., Walcher, H., Kohl, R., Herres, N., Locher, R., Samlenski, R., Brenn, R., Diamond Relat. Mater. 2 (2-4), 158–168 (1993).Google Scholar
6. Van de Rostyne, K., Glorieux, C., Gao, W., Gusev, V., Nesládek, M., Lauriks, W., Thoen, J., phys. stat. sol. (a) 172, 105–111 (1999).Google Scholar
7. Williams, O.A., Douhéret, O., Daenen, M., Haenen, K., Osawa, E., Takahashi, M., Chem. Phys. Lett. 445 (4-6), 255–258 (2007).Google Scholar
8. Côte, R., Van der Donck, T., Celis, J.-P., Glorieux, C., Thin Solid Films 517, 2697–2701 (2009).Google Scholar