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Thin Diamond Films for Tribological Applications

Published online by Cambridge University Press:  28 February 2011

M.S. Wong
Affiliation:
Dept of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
R. Meilunas
Affiliation:
Dept of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
T.P. Ong
Affiliation:
Dept of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
R.P.H. Chang
Affiliation:
Dept of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
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Abstract

Diamond films have been deposited on Si, Mo and many other substrates by microwave and radio frequency plasma enhanced chemical vapor deposition. Although the adhesion between the diamond film and most of the metal substrates is poor due to residual thermal stress from the mismatch of thermal expansion coefficients, we have developed processes to promote the growth of uniform and continuous diamond films with enhanced adhesion to metal substratesfor tribological applications. The tribological properties of these films are measured using a ring-on-block tribotester. The coefficients of friction of diamond films sliding against a 52100 steel ring under the same experimental conditions are found to be significantly different depending on the morphology, grain size and roughness of the diamond films. However, under all cases tested, it is found that for uniform and continuous diamond films with small grain size of 1-3 micrometers, the coefficient of friction of thediamond film sliding against a steel ring under lubrication of a jet of mineral oil is about 0.04.

Type
Research Article
Copyright
Copyright © Materials Research Society 1989

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References

1. Field, J.E., (Editor), Properties of Diamond, (Academic Press, London, 1979).Google Scholar
2. Berman, R., (Editor), Physical Pro oerties of Diamond, (Clarendon Press, Oxford, 1965).Google Scholar
3. Bundy, D.P., Hall, H.T., Strong, H.M. and Wentorf, R.H., Nature, London, 176, 51 (1955).Google Scholar
4. Johnson, G.H., Badzian, A.R. and Gels, M.W., (Editors), Diamond and Diamond-Like Materials Synthesis, (MRS, 1988).Google Scholar
5. DeVries, R.C., Annu. Rev. Mater. Sci., 17, 161 (1987).Google Scholar
6. Angus, J.C. and Hayman, C.C., Science, 241, 913 (1988).Google Scholar
7. Spear, K.E., Earth and Mineral Sciences 56 (4), 53 (1987), Penn State Univ.Google Scholar
8. Murakami, M., Kuan, T. and Blech, I.A., in Treatise on Mat, Sci and Tech, V.24, p.163, edited by Tu, K.N., and Rosenberg., Academic Press, 1982.Google Scholar
9. Nir, D., Thin Solid Film, 146, 27 (1987); 112, 41 (1984).CrossRefGoogle Scholar
10. Gille, G. and Rau, B., Thin Solid Films, 20, 109 (1984).CrossRefGoogle Scholar
11. Samuels, B. and Wilks, J., J. of Mat. Sci., 23, 2846 (1988).Google Scholar
12. Ravi, K.A., Peters, M., Pinneo, M., Gardos, M.N. and Goriano, B.L., Paper Th6, presented in the Diamond Tech. Initiative Symposium, 12-14, July 1988. (unpublished)Google Scholar
13. Meilunas, R., Wong, M.S., Sheng, K.C., Ong, T.P. and Chang, R.P.H., in Laser and Particle Beam Chemical Processes, MRS Proceeding V.129, (MRS, 1989). (to be published)Google Scholar
14. Gangopadhyay, A.K., Fine, M.E. and Cheng, H.S., Lubrication Engineering, A4 (4), 330 (1988).Google Scholar
15. Thewlis, J. and Davey, A.R., Phil. Mag., 1, 409 (1956).Google Scholar
16. Beadle, W.E., Tsai, J.C.C. and Plummer, R.D., (editors), ORM for Si Int. Circiut Tech., p. 256, JW & Son, 1985.Google Scholar
17. Metals Handbook. Volume 2, 9th edition, p. 646, ASM 1980.Google Scholar
18. Somsonv, G.V. and Vinitskii, I.M., Handbooks of Refractory Compounds, p. 202, Plenum, 1980.CrossRefGoogle Scholar
19. Grill, A., Meyerson, B.S. and Patel, V., in Diamond and Diamond-Like Materials Synthesis p.85, (MRS 1988); J. Mater. Res., 3 (2), 214 (1988).Google Scholar
20. Weast, R.C., CRC Handbook of Chemistry and Physics, 68th edition, p. F1618, CRC, 1987.Google Scholar
21. Buckley, D.H. and Rabinowicz, E., in Science of Hard Materials, p. 844, edited by Almond, E.A., Brooks, C.A. and Warren, R., Adan Hilger, 1986.Google Scholar