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Thermodynamic Analysis for the Solid-State Amorphization and Subsequent Crystallization of GaAs/Co

Published online by Cambridge University Press:  26 July 2012

F.-Y. Shiau ,
S.-L. Chen ,
M. Loomans  and
Y. A. Chang
F.-Y. Shiau
Affiliation:
Currently with Tze-Chang Foundation of Science and Technology, Semiconductor Research Center, Hsin-Chu, Taiwan, ROC
S.-L. Chen
Affiliation:
Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.
M. Loomans
Affiliation:
Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.
Y. A. Chang
Affiliation:
Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.
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Abstract

Phase equilibria along the CoGa-CoAs join were determined by DTA and metallography. On the basis of these data and the phase diagram of Co-Ga-As at 600 °C, thermodynamic values for the various phases along the GaAs-Co join were estimated. The Gibbs energy of the amorphous phase is approximated to be that of the supercooled liquid phase. These data were used to rationalize the amorphization process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 230: Symposium R – Phase Transformation Kinetics in Thin Films , 1991 , 39
Copyright
Copyright © Materials Research Society 1992

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