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Thermodynamic Analysis, a useful Tool for MOCVD

Published online by Cambridge University Press:  10 February 2011

C. Bernard ,
A. Pisch ,
F. Weiss  and
R. Madar
C. Bernard
Affiliation:
INPG-ENSEEG-LTPCM, BP 75, F-38402 St.Martin d'Heres, France
A. Pisch
Affiliation:
INPG-ENSEEG-LTPCM, BP 75, F-38402 St.Martin d'Heres, France INPG-ENSPG- LMGP, BP 46, F-38402 St.Martin d'Heres, France
F. Weiss
Affiliation:
INPG-ENSPG- LMGP, BP 46, F-38402 St.Martin d'Heres, France
R. Madar
Affiliation:
INPG-ENSPG- LMGP, BP 46, F-38402 St.Martin d'Heres, France
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Abstract

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 415: Symposium BB – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics II , 1995 , 137
Copyright
Copyright © Materials Research Society 1996

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References

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