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Thermal Conductivity of Confined Ultrathin Polymers

Published online by Cambridge University Press:  31 January 2011

Marc G Ghossoub ,
Jung-Hyun Lee ,
Oksen T Baris ,
David G Cahill  and
Sanjiv Sinha
Marc G Ghossoub
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Mechanical Science and Engineering, Urbana, Illinois, United States
Jung-Hyun Lee
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Mechanical Science and Engineering, Urbana, Illinois, United States
Oksen T Baris
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Mechanical Science and Engineering, Urbana, Illinois, United States
David G Cahill
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Materials Science and Engineering, Urbana, Illinois, United States
Sanjiv Sinha
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Mechanical Science and Engineering, Urbana, Illinois, United States
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Abstract

We report ultrafast measurements of thermal transport in plasma polymerized CHF3 films deposited on standard Si substrates with Al sputtered on top. We characterize the thin films by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and spectroscopic ellipsometry and measure polymer thicknesses ranging from 33 nm down to 6 nm. Time-domain thermoreflectance (TDTR) provides quantitative data on the polymer thermal response to periodic heating from a pulsed laser source. A pump beam heats the Al layer, which acts as an opto-thermal transducer to the stack (Al-Polymer-Si) and a delayed probe beam measures the change in Al surface reflectance. We extract the polymer thermal conductivity by comparing TDTR data to a thermal diffusion model and find it to increase with decreasing polymer thicknesses below 30 nm.

Keywords

thin filmthermal conductivitypolymer
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1172: Symposium T – Nanoscale Heat Transport–From Fundamentals to Devices , 2009 , 1172-T02-03
Copyright
Copyright © Materials Research Society 2009

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References

1 Prasher, R. S. et al., J. of Heat Transfer, 125 (6), 1170–1177 (2003).Google Scholar
2 Forrest, J. A. and Dalnoki-Veress, K., Adv. in Coll. and Interface Science, 94, 167 (2001).Google Scholar
3 Soles, C. L. at al., Phys. Rev. Lett. 88, 037401 (2002).Google Scholar
4 Kurabayashi, K. et al., IEEE J. Micro. Sys., 8 (2), (1999).Google Scholar
5 Kaul, P. B. Day, K. A. and Abramson, A. R. J. Appl. Phys., 101, 083507 (2007).Google Scholar
6 Cahill, D. G. Rev. Sci. Inst., 75, 5119 (2004).Google Scholar
7 Easwarakhanthan, T. et al., J. Vac. Sci. Technol. A, 24 (4), 1036–1043 (2006).Google Scholar
8 Jin, J. S. Lee, J. S. and Kwon, O. Appl. Phys. Lett., 92, 171910 (2008).Google Scholar
9 Costescu, R. M. Wall, M. A. and Cahill, D. G. Phys. Rev. B, 67, 054302 (2003).Google Scholar
10 Cahill, D.G. et al., J. Appl. Phys., 93, 793 (2003).Google Scholar
11 Saito, T. Matsuda, O. and Wright, O. B. Phys. Rev. B, 67, 205421 (2003).Google Scholar