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Theoretical Studies of Gravitational Effects in Chemical Vapor Deposition

Published online by Cambridge University Press:  26 February 2011

Charter D. Stinespring ,
Charles E. Kolb  and
Kurt D. Annen
Charter D. Stinespring
Affiliation:
Aerodyne Research, Inc., 45 Manning Road, Billerica, MA 01821
Charles E. Kolb
Affiliation:
Aerodyne Research, Inc., 45 Manning Road, Billerica, MA 01821
Kurt D. Annen
Affiliation:
Aerodyne Products Corp., 76 Treble Cove Road, Billerica, MA 01862
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Abstract

Chemical Vapor Deposition (CVD) processes are generally carried out under large temperature gradients. These gradients, temperature dependent fluid properties, and the earth's gravitational field give rise to buoyancy-driven free convective fluid flow which augments heat and mass transport in the CVD reactor. Under certain conditions, this free convective flow may alter the gas phase chemistry associated with the deposition process. In order to understand these free convective effects and their implications for the deposition process, a computational model describing the combined effects of fluid mechanics and chemistry has been developed. This model uses a coupled chemical equilibrium/mass transport code in conjunction with a 2-D elliptic fluid dynamics code to describe gas phase species profiles and deposition rates. This paper briefly describes the development of the model, its use, and the results of typical calculations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 87: Symposium O – Materials Processing in the Reduced Gravity Environment of Space , 1986 , 7
Copyright
Copyright © Materials Research Society 1987

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