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Textured Pb(Zr0.54Ti0.46)O3 Thin Films with YBa2Cu3O7-δ and Yttria-Stabilized Zirconia Buffer Layers on (001)Si
Published online by Cambridge University Press: 21 February 2011
Abstract
Characteristics of textured Pb(Zr0.54Ti0.46)O3 (PZT) thin films on (001)Si with YBa2Cu3O7-δ (YBCO) and yttria-stabilized zirconia (YSZ) buffer layers have been studied using X-ray diffraction and high resolution electron microscopy techniques. Excimer KrF laser has been used for deposition of PZT, YBCO and YSZ thin films. The YBCO layer was utilized to provide a seed for PZT growth, while YSZ layer acted as a seed and a buffer layer for the growth of YBCO on (001)Si. High-resolution transmission electron microscopy (HRTEM) and X-ray diffraction were used to determine the texture and the nature of defects, interfaces and grain boundaries. Predominant orientation relationships were found to be [001]PZT//[001]YBCO; [001]YBCO//[001]YSZ; and [001]YSZ//[001]Si.
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- Copyright © Materials Research Society 1993
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