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Tem Study of Defects In CdTe/CdMnTe Superlattices on (100) InSb
Published online by Cambridge University Press: 21 February 2011
Abstract
CdTe/Cd1−xMnx Te superlattices with well/barrier thicknesses ranging from 20Å to 300Å were examined via plan and cross section TEM in analytical instruments capable of EDX and CL. Misfit dislocations, inclined dislocations and stacking faults were observed with a net density of around 109cm−2.
It was observed that the dislocations originated near the substrate/epilayer interface and that stacking faults appeared preferrentially on the pair of {111}B (tellurium terminated) planes in the growth direction rather than on the {111}A planes.
It is suggested that this is due to a difference in mobility between a and P dislocations originating at or near the substrate.
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- Copyright © Materials Research Society 1990