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TEM Investigation of the Ferroelectric Domain Structure in Sputtered PZT Thin Films

Published online by Cambridge University Press:  16 February 2011

J.P. Goral ,
Maria Huffman  and
M.M. Al-Jassim
J.P. Goral
Affiliation:
Solar Energy Research Institute, 1617 Cole Boulevard, Golden, Colorado 80401
Maria Huffman
Affiliation:
Ramtron Corporation, 1873 Austin Bluffs Parkway, Colorado Springs, Colorado 80918
M.M. Al-Jassim
Affiliation:
Solar Energy Research Institute, 1617 Cole Boulevard, Golden, Colorado 80401
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Abstract

The ferroelectric domain structure in sputtered lead zirconate titanate (PZT) thin films has been investigated using transmission electron microscopy (TEM) and transmission electron diffraction (TED). The individual ferroelectric domains occur as {110}-type microtwins as is observed in the bulk ceramic. The arrangement and size of the ferroelectric domains is strongly dependent on the microstructure of the sputtered film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 200: Symposium Y – Ferroelectric Thin Films I , 1990 , 225
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1. Huffman, M., Goral, J. P., Al-Jassim, M. M. Mason, A. R. and Jones, K. M., presented at the 8th International Conference on Thin Films, San Diego, California, April 1990, to be published in Thin Solid Films, (1990).Google Scholar
2. Lucuta, P. G., J. Am. Ceram. Soc., 72, 933 (1989).Google Scholar
3. Randall, C. A., Barber, D. J. and Whatmore, R. W., J. Mater. Sci., 22, 925 (1987).Google Scholar
4. Lucuta, P. G., Teodorescu, V. and Vasiliu, F., Appl. Phys. A 37, 237 (1985).Google Scholar
5. Goo, E. K. W., Mishra, R. K. and Thomas, G., J. Appl. Phys., 52, 2940 (1981).Google Scholar
6. Chang, Y., Appl. Phys., A 29, 237 (1982).Google Scholar
7. Jaffe, B., Cook, R. and Jaffe, H., Piezoelectric Ceramics (Academic Press, New York, 1971)Google Scholar
8. Michel, C., Philips tech. Rev., 36, 18 (1976).Google Scholar
9. Bihan, R. Le and Maussion, M., Ferroelectrics, 7, 307 (1974).Google Scholar
10. Zhirnov, V. A., Sov. Phys. JETP, 35 822 (1959).Google Scholar