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A Technique for Preparing “Two in One” Cross-Sectional TEM Specimens

Published online by Cambridge University Press:  16 February 2011

Guang-Hwa M. Ma  and
Sopa Chevacharoenkul
Guang-Hwa M. Ma
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695–7907
Sopa Chevacharoenkul
Affiliation:
Materials Research Group, Microelectronics Center of North Carolina, Research Triangle Park, NC 27709
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Abstract

A modified “two-in-one” cross-sectional TEM sample preparation technique is described. By coating a thin layer of “marker” to distinguish one sample from the other, two samples could be simultaneously prepared in one TEM cross-sectional specimen. Therefore, the specimen preparation time is reduced by nearly one half. The coating can be done in an existing ion-mill. Criteria for choosing a suitable marker as well as tips on getting good quality specimens are described. An example of applying this technique to a processing-microstructure study of an ultra-shallow junction formation in silicon is demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 199: Symposium W – Specimen Preparation for Transmission Electron Microscopy of Materials II , 1990 , 235
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1. Abrahams, M. S. and Buiocchi, C. J., J. Appl. Phys. 45, 3315 (1974).Google Scholar
2. Sheng, T. T. and Marcus, R. B., J. Electrochem. Soc. 127(3), 737 (1980).Google Scholar
3. Bravman, J. C. and Sinclair, R., J. Electron Microsc. Technique 1 53 (1984).Google Scholar
4. Rivaud, Lydia, J. Electron Microsc. Technique 2, 577 (1985).Google Scholar